Precision Specification of Granite Air Flotation Platform
Applicable Standards: GB/T20428, ISO8512-2, DIN876, ISO230-1; Test Ambient: 20℃±1℃, RH40%~60%, Vibration Grade VC-E, Clean Dust-free Environment Part 1: Granite Base Geometric Precision (Benchmark Surface) Precision Grade Flatness Tolerance(μm per meter) Surface Roughness Ra Adjacent Surface Squareness Typical Application Grade 000 (Ultra-precision) ≤1.0 ≤0.05μm ≤1.5μm/m Semiconductor, Lithography, Nano Inspection Stage Grade 00 (High Precision) ≤2.0 ≤0.10μm…