Comment déterminer si les trous d'air d'une plate-forme à coussin d'air en granit de précision sont obstrués ?
I. Jugements les plus intuitifs et les plus rapides (regarder, toucher, pousser)
I. Jugements les plus intuitifs et les plus rapides (regarder, toucher, pousser)
The precision grades of precision air-bearing platforms (granite air-bearing platforms) are generally classified in the industry into two systems: motion accuracy and planar referen I. Granite Platform Precision Grade (Metrology Grade)This is the base grade, determining how accurate the reference surface is:TableGrade Flatness (Typical) Applicable EquipmentGrade 000 ≤ 2 μm/m² Ultra-high precision CMM, semiconductor inspection,…
000 Grade Granite Air Bearing Platform Typical Suitable EquipmentI. High-end Semiconductor & Panel Equipment (Core Field)Lithography Equi Lithography Alignment PlatformsWafer Inspection Machines, Wafer ProbersSemiconductor Thin Film Measurement, ProfilometersChip Bonding Machines, Flip Chip EquipmentFlat Panl Display (OLED/LCD) Micro Inspection, Laser Repair EquipmentII. Ultra-high Precision Measuring InstrumentsUltra-high Precision Coordinate Measuring Machines (CMM)Laser In Measurement PlatformsHigh Precision Profilometers,…
I. Core Principles and Structural CompositionWorking Principle: High-pressure clean air is sprayed through porous graphite/throttle hes to form a uniform air film of 5–15 μm between the granite base and the moving slide; contactless levitation achieves zero-friction motion, while relying on air fitiffness for load-bearing and guidance; often combined with vacuum preloading/magnetic preloading to enhance…
I. Core Definitions and FunctionsThe granite base (worktable gantry/column fraa CMM serves as the absolute reference for measurement, establishing a stable three-dimensional coordinate system, supporting workpieces and moving components, and suppressing vibration and thermal deformation; high-end models ofadopt an all-granite structure (integrated three-axis guides) to ensure overall thermal consistency. Granite Base II. Irreplaceable Material CharacteristicsLong-term…
I. Material Selection (Determines whether it will crack and stability)Material TypesPriority:Jinan Green, Zhangqiu Black (fine-grained, uniform, best stability)Acceptance Key Points (Must-read for procurement)No cracks, no laminations, no bla, no weathered layersUniform crystal grains, no obvious color bandsMust be solid material; splicing and patching prohibitedCritical NotePoor raw material → No matter how muct processing is done,…
I. Source Prevention: Selecting the Right Material and Using the Correct Process (Most Critical)Material SelectionPrioritize fine-grained granite with few cracks and layers, such as Jinan Green and Zhangqiu Black.Avoid materials with hidden cracks, color spots, layers, or water lines.Structural DesignLarge platforms must not be too thin; insufficient thickness makes them extremely prone to breaking.Corners, slots,…
Factors affecting the coaxiality of Coordinate Measuring Machines (CMMs) essentially boil down to: inaccurate axint, unstable workpieces, machine inaccuracy, unstable environment, and improper methods. I have compiled this into the most practical, ready-to-use version for the shop floor, without unnecessary erbosity. I. Machine Inherent Accuracy (Root Cause)Geometric AccuracyPerpendicularity, straightness, pitch, and yaw of the three…
Precision granite platforms and components are upgrading in five major directions: high precision, integration, intelligence, greenness, and servitization. The core driving force is the rigid demand of high-end manufacturing sectors such as semiconductors, new energy, and aerospace for “extremeility data perception green compliance.” I. Materials and Performance: Extreme Stability and Composite InnovationBreakthroughs in precision limits:…
I. Material and Long-term StabilityNatural aging, extremely low internal stress: High-quality granite (s Jinan Black) undergoes geological aging over hundreds of millions of years, releasing internal residual stress. After precision machining, there is almost no slow deformation, and the precision retention cyc is long (no major overhaul or calibration required for 5–8 years), far superior…