Granite for semiconductor equipment: thermal stability and precision
Specialized Granite for Semiconductor Equipment: A Comprehensive Analysis of Thermal Stability Geometric PrecisionSemiconductor lithography, wafer inspection, probe stations, die bonders, and AOI optical equipment require a long-term stable reference at the nanometer scale. Relying on extremely low thermal expansion, zero time-dependent creep, and ultra-high flatness reference precision, granite has become the only structural base material…