Precision rolled to the nanometer level, from foundation to intelligence: The evolutionary path of the marble linear motor
Precision rolled to the nanometer scale, from cornerstone to intelligence: The evolution of the marble linear motorIntroductionSemiconductor lithography, laser micro-nano machining, high-precision optical inspection, third-generation semiconductor metrology… High-end manufacturing is continuously advancing toward the micro and nano scales. When equipment positioning requirements break through the micrometer threshold, the shortcomings of traditional metal machine beds and…