The king of stable precision in precision manufacturing: marble platforms and linear motors
The King of Stable Precision in Precision Manufacturing: Marble Platforms and Linear Motors I. IntroductionThe positioning accuracy requirements for semiconductor metrology, micro-nano laser processing, optical inspection, and high-end automation equipment continue to descend to the sub-micron and nanometer levels. To achieve long-term stable ultra-high precision, a single high-performance driving component is far from enough. Linear…