Comparison of the application of high-hardness ceramics and granite in the semiconductor industry
In the semiconductor industry, high-hardness ceramics (Al₂O₃, SiC, Si₃N₄, etc.) primarily target “chamber interiors / moving parts / extreme operating conditions,” while granite focuses on “large bases / platforms / vibration isolation references,” forming a clear complementary division of labor. The following is a direct comparison from four aspects: performance, typical applications, machining and assembly,…