Air-Floating Multi-Axis Precision Motion Platform
I. Product Introduction
Using 000/00 grade natural granite as the reference base, it adopts an air bearing non-contact levitation linear/voice coil direct drive structure, with no mechanical friction and no backlash. Combined with a grating closed-loop control system, it forms multi-axis linked precision motion systems such as XY, XYZ, and XYθ. Relying on compressed air to form a micron-level air film to support moving parts, it achieves nano/sub-micron level positioning accuracy.
II. Core Structure
Granite Base: Jinan Qing stone, low thermal expansion, high stability, reference surface 000/00 grade flatness accuracy;
Air Bearing Guide Rails: Micro-pore/small-hole air floating pads, air film 10~15μm, zero friction;
Drive Unit: Ironless linear motor/voice coil motor, high speed and high acceleration;
Measurement and Control System: High-precision grating scale servo closed-loop, multi-axis linked controller.
III. Key Accuracy
Positioning Accuracy: ±0.05~1μm; Repeatability: 0.015~0.2μm;
Single-axis Straightness ≤0.5~3μm/m, Multi-axis Perpendicularity 1~8 arc seconds;
Operation without crawling or air vibration, excellent high and low speed stability.
IV. Main Application Fields
Semiconductor Industry: Wafer probe stations, chip inspection, lithography alignment, wafer dicing positioning;
Optoelectronic Display: LCD/OLED defect inspection, lens coupling, COG bonding stations;
Precision Metrology: Optical measurement instrument bases, standard gauge calibration, CMM supporting platforms;
Laser Micromachining: Ultrafast laser drilling, sapphire/PCB micro-cutting and marking;
Aerospace Precision Inspection: Aerospace small part contour scanning, high-precision dimensional measurement;
Medical Precision Parts: Micro-catheters, implantable parts, endoscope accessories quality inspection;
Research Institutions: Nano experiments, optical debugging, new material performance testing;
Electronic PCB: AOI optical inspection, micro-hole processing positioning.
V. Product Advantages
Zero wear, service life of over 20 years; no mechanical backlash, good consistency in high and low speed motion; extremely small thermal drift of the granite base material, maintaining long-term accuracy in a constant temperature environment.
