What methods can further improve the vibration isolation effect of a 3D precision platform?
Comprehensive Solution for Enhancing Vibration Isolation Performance of 3D Precision PlatformsDivided into four major dimensions: base body vibration reduction, isolation support system, internal platform vibration suppression, and environmental/operational optimization, covering general modification/selection solutions for granite precision motion platforms, suitable for micron and sub-micron level inspection, semiconductor, and optical equipment.I. Base Material Optimization (Reducing Self-Vibration Transmission…
