Day: 06/05/2026

Air-bearing multi-axis platform accuracy specificationNanometer-level accuracy can be achieved1 Nanometer-level indicators (000-grade granite base voice coil / linear motor nanometer grating)Positioning accuracy: ±0.05μm (50nm) ~ ±0.2μm (200nm)Repeatability: 10nm ~ 50nmSingle-axis straightness: ≤0.5μm/mMinimum step size: up to 5nm2 Essential conditions for implementationBase: 000-grade Jinan black granite, constant temperature 20±1℃, aged and stress-relieved;Air-bearing: Porous air bearing, air…

Air-Floating Multi-Axis Precision Motion PlatformI. Product IntroductionUsing 000/00 grade natural granite as the reference base, it adopts an air bearing non-contact levitation linear/voice coil direct drive structure, with no mechanical friction and no backlash. Combined with a grating closed-loop control system, it forms multi-axis linked precision motion systems such as XY, XYZ, and XYθ. Relying…