News & Article

In the field of ultra-precision manufacturing and metrology, equipment bases are not merely simple support structures, but the physi carriers of precision benchmarks—their performance directly

Natural granite is the preferred structural material for semiconductor inspection platforms, with extensive mature applications in wafe inspection, optical inspection, CMM measurement, AOI/X-ray inspection, probe

I. Daily Maintenance (Daily / Per Use)Ventilate first, then power on; Power off first, then hut off gasStartup: Stable gas source → Air bearing floats

I. Most Intuitive and Fastest Judgments (Look, Touch, Push)

The precision grades of precision air-bearing platforms (granite air-bearing platforms) are generally classified in the industry into two systems: motion accuracy and planar referen I.

000 Grade Granite Air Bearing Platform Typical Suitable EquipmentI. High-end Semiconductor & Panel Equipment (Core Field)Lithography Equi Lithography Alignment PlatformsWafer Inspection Machines, Wafer ProbersSemiconductor Thin

I. Core Principles and Structural CompositionWorking Principle: High-pressure clean air is sprayed through porous graphite/throttle hes to form a uniform air film of 5–15 μm

I. Core Definitions and FunctionsThe granite base (worktable gantry/column fraa CMM serves as the absolute reference for measurement, establishing a stable three-dimensional coordinate system, supporting

I. Material Selection (Determines whether it will crack and stability)Material TypesPriority:Jinan Green, Zhangqiu Black (fine-grained, uniform, best stability)Acceptance Key Points (Must-read for procurement)No cracks, no

I. Source Prevention: Selecting the Right Material and Using the Correct Process (Most Critical)Material SelectionPrioritize fine-grained granite with few cracks and layers, such as Jinan