NOUVELLES

Application Field Product Type Key Precision Indicators (Reference Surface) Thermal Performance Indicators Mechanical / Vibration Resistance Indicators Core Application Requirements Advanced Lithography Machines (EUV / ArF Immersion) Integrated Water-Cooled SiC Machine Base / Reticle Stage Base Flatness ≤0.05μm/mStraightness ≤0.03μm/mPerpendicularity ≤0.05μm/mSurface Roughness Ra ≤0.01μm Thermal Conductivity ≥180W/(m·K)Coefficient of Linear Thermal Expansion ≈3.8×10⁻⁶/℃Temperature Difference Across Entire Area…

Why Silicon Carbide Ceramic Components are the Core Key to Next-Generation Precision Machinery Facing next-generation high-end precision equipment such as EUV/advanced lithography, 3nm and below semiconductor equipment, ultra-precision optics, vacuum metrology, and high-speed nano-motion platforms, traditional granite, aluminum alloys, steel, and alumina ceramics have reached performance bottlenecks. Silicon carbide (SiC) advanced ceramics, with their ultimate…

The core reason for the high precision requirements of semiconductor equipment granite basesSemiconductor manufacturing belongs to nano-scale precision processing/inspection (lithography, metrology, probe stations, coating, cutting equipment), with minimum feature sizes reaching the 2nm and 3nm levels. The granite base serves as the reference load-bearing matrix for the entire machine, with all optical, motion, and measurement…

Complete Selection Guide for Granite Tables Dedicated to Metrology and CalibrationCore Requirements for Metrology and Calibration Tables: Long-term dimensional stability, extremely low thermal expansion, minimal deformation, traceable flatness, vibration damping, and wear resistance. Selection follows a 7-step screening process: “Material → Precision Grade → Size and Thickness → Aging Process → Support Base → Functional…

Flatness accuracy range of granite machine tool bases with threaded inserts:Implementing the national standard GB/T 20428-2006 “Granite Surface Plates”, divided into 4 accuracy grades. Due to the slight increase in machining difficulty caused by the drilling and embedding processes of pre-embedded stainless steel threaded inserts, the industry can actually stably achieve the following standards (tested…

Complete Selection Guide for High-Precision Granite Machine Tool Bases with Threaded InsertsFollow the 7-step screening process: Application Scenario → Material → Precision → Dimensions & Thickness → Threaded Insert Configuration → Supporting Structure → Manufacturer Process to avoid common pitfalls such as hole deformation, insert detachment, insufficient precision, and inadequate rigidity in one go.I. Step…

High-precision granite machine tool base with threaded inserts I. Basic Product DefinitionMade of dense black natural granite (primarily Jinan Green) through integral grinding and shaping, the base features pre-embedded stainless steel threaded inserts (threaded sleeves) on the working surface, sides, and bottom. Replacing cast iron machine tool beds, it serves as a reference base for…

Full Precision Assurance Solution for Granite Machine Tool Bases with Threaded Inserts Common causes of precision failure: internal stress of the stone, stress from embedded inserts, insufficient grinding process, environmental temperature changes, reversed processing sequence, loose inserts, and insufficient rigidity. By controlling the entire process from raw materials → embedding process → grinding and machining…

I. Core Material and Innate AdvantagesMainly using Jinan Green fine-grained black granite, naturally aged for hundreds of millions of years with no internal stress, offering outstanding advantages compared to cast iron reference plates:Ultra-low thermal expansion: Thermal expansion coefficient 2.5~4.6×10⁻⁶/℃, almost no deformation under temperature changes, suitable for constant temperature metrology, optics, and semiconductor scenarios;High rigidity…

Granite XY Platform for Ultra-Precision Measurement (Granite Motion Stage)Linear Motor Granite XYI. Material Selection and Core Physical Advantages (Why Only Black Granite is Used)Industry Standard Materials: Jinan Blue, Indian Black, Diorite (Black Gold Sand); marble is strictly prohibited. Core characteristics for ultra-precision measurement:Extremely Low Thermal Expansion CoefficientLinear expansion coefficient of 6~8μm/m・℃, only1/3 of steel. Dimensions…