Pour quels équipements les plates-formes à coussin d'air de différents niveaux de précision sont-elles adaptées ?
000 Grade Granite Air Bearing Platform Typical Suitable EquipmentI. High-end Semiconductor & Panel Equipment (Core Field)Lithography Equi Lithography Alignment PlatformsWafer Inspection Machines, Wafer ProbersSemiconductor Thin Film Measurement, ProfilometersChip Bonding Machines, Flip Chip EquipmentFlat Panl Display (OLED/LCD) Micro Inspection, Laser Repair EquipmentII. Ultra-high Precision Measuring InstrumentsUltra-high Precision Coordinate Measuring Machines (CMM)Laser In Measurement PlatformsHigh Precision Profilometers,…