Jour : 06/29/2026

Why Silicon Carbide Ceramic Components are the Core Key to Next-Generation Precision Machinery Facing next-generation high-end precision equipment such as EUV/advanced lithography, 3nm and below semiconductor equipment, ultra-precision optics, vacuum metrology, and high-speed nano-motion platforms, traditional granite, aluminum alloys, steel, and alumina ceramics have reached performance bottlenecks. Silicon carbide (SiC) advanced ceramics, with their ultimate…

The core reason for the high precision requirements of semiconductor equipment granite basesSemiconductor manufacturing belongs to nano-scale precision processing/inspection (lithography, metrology, probe stations, coating, cutting equipment), with minimum feature sizes reaching the 2nm and 3nm levels. The granite base serves as the reference load-bearing matrix for the entire machine, with all optical, motion, and measurement…