Applicable Standards: GB/T20428, ISO8512-2, DIN876, ISO230-1; Test Ambient: 20℃±1℃, RH40%~60%, Vibration Grade VC-E, Clean Dust-free Environment Part 1: Granite Base Geometric Precision (Benchmark Surface) Precision Grade Flatness Tolerance(μm per meter) Surface Roughness Ra Adjacent Surface Squareness Typical Application Grade 000 (Ultra-precision) ≤1.0 ≤0.05μm ≤1.5μm/m Semiconductor, Lithography, Nano Inspection Stage Grade 00 (High Precision) ≤2.0 ≤0.10μm ≤3.0μm/m CMM Base, Optical Inspection Equipment Grade 0 (Industrial Precision) ≤4.0 ≤0.20μm ≤6.0μm/m Precision Machining & Vision Inspection Grade 1 (General Industrial) ≤8.0 ≤0.40μm ≤12μm/m Training Bench, Ordinary Automation Fixture Flatness Calculation Formula: Tolerance = Coefficient × √(L×W); Coefficient:000=0.003,00=0.006,0=0.012,1=0.024 (Unit:μm) Additional Base Material & Machining Requirement 1. Material: Jinan Black Granite; Linear Expansion Coefficient ≤4.6×10⁻⁶/℃, Water Absorption＜0.13%, Shore Hardness HS≥702. Guide Mounting Straightness: Grade000 ≤0.8μm/m; Grade00 ≤1.6μm/m3. Overall Level after Levelling Foot Adjustment: ≤2μm/1000mm4. Thread Hole Position Tolerance:000≤±0.02mm;00≤±0.05mm; Counterbore Parallelism ≤2μm/100mm Part 2: Air Bearing Motion Precision (Air Film & Drive System) 1. Positioning Accuracy (Full Travel Range) – Nano Grade(Base 000): ±0.1~±0.3μm- Sub-micron Grade(Base 00): ±0.3~±1.0μm- Micron Grade(Base 0/1): ±1.0~±3.0μm 2. Repeat Positioning Accuracy (3σ Statistical Value) – Ultra-precision: ≤±0.05~±0.1μm- High-precision: ≤±0.2μm- General Industrial: ≤±0.5~±1.0μm 3. Straightness of Single Axis Full Stroke – Grade000: ≤0.5μm/1000mm- Grade00: ≤1.2μm/1000mm- Grade0: ≤3.0μm/1000mm 4. Air Film Core Parameter Standard air film thickness: 10~15μm, Air film stiffness ≥120N/μm; No air hammer & crawling phenomenon, zero mechanical contact friction 5. X/Y Orthogonality (Multi-axis Platform) Grade000 ≤1 arcsec; Grade00 ≤3 arcsec; Grade0 ≤8 arcsec Part3 Application Grade Matching Table 1. Semiconductor/Lithography: Grade000 Base + Position ±0.2μm, Repeat ≤0.1μm2. CMM/High-end Vision: Grade00 Base + Position ±0.5μm, Repeat ≤0.2μm3. Precision Machining Inspection: Grade0 Base + Position ±1.5μm, Repeat ≤0.6μm4. Teaching & Ordinary Fixture: Grade1 Base + Position ±3.0μm Part4 Acceptance & Inspection Condition 1. Pre-test Stabilization: Place platform in constant-temperature room for ≥72h to release internal stone stress before detection2. Inspection Instruments: Laser Interferometer, White-light Roughness Tester, Electronic Precision Level, Squareness Calibrator3. Compliance Code: GB/T20428, ISO8512-2, DIN876, ISO230-1
