Air-bearing multi-axis precision motion platform Product Advantages
Zero mechanical friction, no wear
Relies on compressed air to form a 0-15μm air film for levitation, with no physical contact between the slider and the base. There is no guide rail wear or iron filings, the precision does degrade over long-term use, and the granite base has a service life of over 20 years.
No stick-slip, smooth low-speed motion
Completely the stick-slip phenomenon of mechanical guide rails, ensuring smooth operation from nm-level micro-feed to high-speed running, suitable for nanometer-level micro-adjustment.High motion accuracy, reaching nanometer level
Equipped with nanometer grating closed-loop control, repeat positioning is 10-50nm, and positioning accuracy is up ±50nm. The multi-axis perpendicularity and straightness indicators are far superior to ball screw and linear guide rail structures.
Excellent high-speed and high-acceleration
No-load acceleration can reach 1G to 4G, and the maximum operating speed is 2000mm/s, balancing high precision and high efficiency suitable for automated high-speed inspection and laser processing.
Low thermal drift, excellent stability
The base is made of Jinan blue granite, which has an extremely low linear expansion, minimal deformation under ambient temperature changes, and stable precision during long-term continuous operation.
Low operating vibration and noise
No metal impact or friction, quiet operation, and no interference for precision applications such as optical lens and wafer inspection.
Maintenance-free
No lubricating oil, no wear-prone balls/bearings, only requires a dry and clean air source, resulting in extremely low subsequent operation and maintenance costs.
