Air-bearing multi-axis platform accuracy specification
Nanometer-level accuracy can be achieved
1 Nanometer-level indicators (000-grade granite base voice coil / linear motor nanometer grating)
Positioning accuracy: ±0.05μm (50nm) ~ ±0.2μm (200nm)
Repeatability: 10nm ~ 50nm
Single-axis straightness: ≤0.5μm/m
Minimum step size: up to 5nm
2 Essential conditions for implementation
Base: 000-grade Jinan black granite, constant temperature 20±1℃, aged and stress-relieved;
Air-bearing: Porous air bearing, air film 10~15μm, clean and dry air source;
Feedback: Grating resolution 1nm/5nm;
Environment: Dust-free, VC-E ultra-low vibration foundation.
3 Conventional 00-grade configuration
Mostly sub-micron level (0.3~1μm), mainly used for display and PCB inspection, cannot reach nanometer level.
4 Applications
Nanometer-level platforms: Wafer probing, lithography, optical coupling, nanometer scientific research equipment.
