Jour : 06/30/2026

Complete Application Fields of Silicon Carbide Ceramic Precision Equipment Bases (Including Integrated Water-Cooled Bases) Silicon carbide bases, relying on five core advantages—high specific stiffness, high thermal conductivity, low thermal expansion, wear resistance/cleanliness, and the ability to integrate water-cooling channels—replace granite, cast iron, aluminum alloy, and alumina ceramics. They are primarily used in nanometer-scale ultra-precision equipment,…

Application Field Product Type Key Precision Indicators (Reference Surface) Thermal Performance Indicators Mechanical / Vibration Resistance Indicators Core Application Requirements Advanced Lithography Machines (EUV / ArF Immersion) Integrated Water-Cooled SiC Machine Base / Reticle Stage Base Flatness ≤0.05μm/mStraightness ≤0.03μm/mPerpendicularity ≤0.05μm/mSurface Roughness Ra ≤0.01μm Thermal Conductivity ≥180W/(m·K)Coefficient of Linear Thermal Expansion ≈3.8×10⁻⁶/℃Temperature Difference Across Entire Area…