Plataformas con cojinetes de aire: el secreto fundamental para la estabilidad a largo plazo con una precisión subnanométrica
In high-end fields such as semiconductors, precision inspection, and micro/nano manufacturing, sub-nanometer precision is a core requirement for equipment operation, while the long-term stability of ision is the key determinant of product yield and equipment service life. The reason air bearing platforms can break through the limitations of traditional platforms and achieve non-decaying sub-nanometer preciies…
