News & Article

I. Most Intuitive and Fastest Judgments (Look, Touch, Push)

The precision grades of precision air-bearing platforms (granite air-bearing platforms) are generally classified in the industry into two systems: motion accuracy and planar referen I.

000 Grade Granite Air Bearing Platform Typical Suitable EquipmentI. High-end Semiconductor & Panel Equipment (Core Field)Lithography Equi Lithography Alignment PlatformsWafer Inspection Machines, Wafer ProbersSemiconductor Thin

I. Core Principles and Structural CompositionWorking Principle: High-pressure clean air is sprayed through porous graphite/throttle hes to form a uniform air film of 5–15 μm

I. Core Definitions and FunctionsThe granite base (worktable gantry/column fraa CMM serves as the absolute reference for measurement, establishing a stable three-dimensional coordinate system, supporting

I. Material Selection (Determines whether it will crack and stability)Material TypesPriority:Jinan Green, Zhangqiu Black (fine-grained, uniform, best stability)Acceptance Key Points (Must-read for procurement)No cracks, no

I. Source Prevention: Selecting the Right Material and Using the Correct Process (Most Critical)Material SelectionPrioritize fine-grained granite with few cracks and layers, such as Jinan

Factors affecting the coaxiality of Coordinate Measuring Machines (CMMs) essentially boil down to: inaccurate axint, unstable workpieces, machine inaccuracy, unstable environment, and improper methods. I

Precision granite platforms and components are upgrading in five major directions: high precision, integration, intelligence, greenness, and servitization. The core driving force is the rigid

I. Material and Long-term StabilityNatural aging, extremely low internal stress: High-quality granite (s Jinan Black) undergoes geological aging over hundreds of millions of years, releasing