Jour : 03/13/2026

The precision grades of precision air-bearing platforms (granite air-bearing platforms) are generally classified in the industry into two systems: motion accuracy and planar referen I. Granite Platform Precision Grade (Metrology Grade)This is the base grade, determining how accurate the reference surface is:TableGrade Flatness (Typical) Applicable EquipmentGrade 000 ≤ 2 μm/m² Ultra-high precision CMM, semiconductor inspection,…

000 Grade Granite Air Bearing Platform Typical Suitable EquipmentI. High-end Semiconductor & Panel Equipment (Core Field)Lithography Equi Lithography Alignment PlatformsWafer Inspection Machines, Wafer ProbersSemiconductor Thin Film Measurement, ProfilometersChip Bonding Machines, Flip Chip EquipmentFlat Panl Display (OLED/LCD) Micro Inspection, Laser Repair EquipmentII. Ultra-high Precision Measuring InstrumentsUltra-high Precision Coordinate Measuring Machines (CMM)Laser In Measurement PlatformsHigh Precision Profilometers,…