Marble square (commonly referred to as granite square) is a high-precision right-angle reference gauge. Its core purpose is to provide a stable 90° reference surface for inspecting and calibrating flatness, perpendicularity, and straightness, and it is widely used in precision machining, metrological inspection, and equipment installation. I. Core Applications (Four Major Scenarios) II. Core Characteristics…
Marble Square Box vs. Cast Iron Square Box: ComparisonI. Core Performance1. Precision and Stability- Marble Square Box: Resistant to thermal expansion and contraction, maintains good precision over long-term use, suitable for high-precision measurements.- Cast Iron Square Box: Easily deformed by temperature and external forces, resulting in faster precision decay; mostly used in general working conditions.2….
Air-bearing multi-axis precision motion platform Product AdvantagesZero mechanical friction, no wearRelies on compressed air to form a 0-15μm air film for levitation, with no physical contact between the slider and the base. There is no guide rail wear or iron filings, the precision does degrade over long-term use, and the granite base has a service…
Air-bearing multi-axis platform accuracy specificationNanometer-level accuracy can be achieved1 Nanometer-level indicators (000-grade granite base voice coil / linear motor nanometer grating)Positioning accuracy: ±0.05μm (50nm) ~ ±0.2μm (200nm)Repeatability: 10nm ~ 50nmSingle-axis straightness: ≤0.5μm/mMinimum step size: up to 5nm2 Essential conditions for implementationBase: 000-grade Jinan black granite, constant temperature 20±1℃, aged and stress-relieved;Air-bearing: Porous air bearing, air…
Air-Floating Multi-Axis Precision Motion PlatformI. Product IntroductionUsing 000/00 grade natural granite as the reference base, it adopts an air bearing non-contact levitation linear/voice coil direct drive structure, with no mechanical friction and no backlash. Combined with a grating closed-loop control system, it forms multi-axis linked precision motion systems such as XY, XYZ, and XYθ. Relying…
Applicable Standards: GB/T20428, ISO8512-2, DIN876, ISO230-1; Test Ambient: 20℃±1℃, RH40%~60%, Vibration Grade VC-E, Clean Dust-free Environment Part 1: Granite Base Geometric Precision (Benchmark Surface) Precision Grade Flatness Tolerance(μm per meter) Surface Roughness Ra Adjacent Surface Squareness Typical Application Grade 000 (Ultra-precision) ≤1.0 ≤0.05μm ≤1.5μm/m Semiconductor, Lithography, Nano Inspection Stage Grade 00 (High Precision) ≤2.0 ≤0.10μm…
Brand Classification of Epoxy Adhesives for Repairing Precision Granite Bases (Semiconductor / Metrology Platforms) Divided into three categories: Imported High-End (Preferred for lithography machines / 000-grade platforms), Industrial Mid-Range (Ordinary 00-grade inspection platforms), and Domestic Precision Alternatives (Cost-effective). All must meet the requirements of low shrinkage (<0.5%), high rigidity, polishability, and optional anti-static properties. Home…
Gaps in granite bases (platforms) for semiconductors / precision equipment: the core principle is to the crack first, then structurally reinforce, and finally perform precision repositioning and calibration; the use of ordinary marble glue / cement is strictly prohibited. Low-shrinkage, high-idity, anti-static specialized epoxy must be used, and the entire process must be operated in…
Precision Granite Components: Quality Control Key Points for the Finishing Stage Finishing (fine milling, fine grinding, ultra-precision grinding, polishing, hole finishing, and insert assembly) is the core process that determines the final precision, surface quality, and operational stability of the finished product. For five-axis machine tool granite bases / large bases, the implementation key points…
Specialized Marble Platform for Semiconductors (Core: High Stability Anti-static Nanometer Precision)Marble platforms for semiconductors (mostly natural granite / Jinan Green) serve as the core bases for lithography machines, wafer inspection, die bonding / dispensing, and etching / deposition, responsible for “locking in” precision and stability in nanometer-scale processes. I. Core Materials (Semiconductor Grade)Material: Jinan Green…
