What are the requirements for the flatness of the base for nanometer-level positioning accuracy?
Technical Requirements for Flatness of Nanoscale Positioning System Bases (Granite / Marble Bases)Applicable Objects: Linear motor platforms, semiconductor inspection equipment, optical alignment platforms, nano-displacement stages, CMM core bases; Mainstream Material: Jinan Blue Granite.Core Logic: The system pursues nanoscale positioning (±1~100 nm), and the drives (linear motors, gratings, voice coil motors) can only correct dynamic motion…