The precision grades of precision air-bearing platforms (granite air-bearing platforms) are generally classified in the industry into two systems: motion accuracy and planar referen
I. Granite Platform Precision Grade (Metrology Grade)
This is the base grade, determining how accurate the reference surface is:Table
Grade Flatness (Typical) Applicable Equipment
Grade 000 ≤ 2 μm/m² Ultra-high precision CMM, semiconductor inspection, lit air-bearing platforms
Grade 00 ≤ 3 μm/m² High precision CMM, precision air-bearing motion platforms, inspection tables
Grade 0 ≤ 5 μm/m² General measuring machines, precision workbenches
Grade 1 ≤ 10 μm/m² Inspection platforms, marking platforms
Air-bearing plat exclusively use: Grade 00, Grade 000
II. Air-bearing Motion Platform Precision Grade (Industry Standard)
Divided into 4 levels based on positioning acy and repeatability, directly corresponding to equipment tiers:
- General Precision Level
Repeatability: ±1 μm
Positioning AccuraApplications: General inspection, semi-automatic alignment - High Precision Level (Most Common)
Repeatability: ±0.5 μm
Positioning Acuracy: ±1～2 μm
Applications: Standard granite air-bearing platforms, high-end CMM, optical inspection - Ultra-high Precision Level
Repeatablity: ±0.1～0.2 μm
Positioning Accuracy: ±0.5 μm
Applications: Semiconductor front-end inspection, laser interferometry, nano-alignment
4.ano Level
Repeatability: ±10～50 nm
Positioning Accuracy: Within ±0.1 μm
Applications: Lithography, quantum precision, nimprint
III. Air-bearing Platform Straightness and Perpendicularity Grades (Intuitive Judgment)
High-end air-bearing platform straightness: .1～0.5 μm/300mm
Perpendicularity: ±1～3 μm/m
Motion Smoothness: No crawling, no vibration, no jitter
IV. Simplest Memorizat Method (Use directly for Quotation / Selection)
Grade 000 Granite Repeatability ±0.1～0.5 μm = Ultra-high Precision Air-beariatform
Grade 00 Granite Repeatability ±0.5～1 μm = High Precision Air-bearing Platform
Below this, it is generally not considered a precisioning platform.
