{"id":3025,"date":"2026-06-30T08:35:07","date_gmt":"2026-06-30T00:35:07","guid":{"rendered":"https:\/\/jtlcnc.com\/?p=3025"},"modified":"2026-06-30T08:35:08","modified_gmt":"2026-06-30T00:35:08","slug":"comparative-table-of-core-performance-indicators-of-silicon-carbide-ceramic-substrates-for-various-application-fields","status":"publish","type":"post","link":"https:\/\/jtlcnc.com\/ru\/2026\/06\/30\/comparative-table-of-core-performance-indicators-of-silicon-carbide-ceramic-substrates-for-various-application-fields\/","title":{"rendered":"Comparative Table of Core Performance Indicators of Silicon Carbide Ceramic Substrates for Various Application Fields"},"content":{"rendered":"
Application Field<\/th>Product Type<\/th>Key Precision Indicators (Reference Surface)<\/th>Thermal Performance Indicators<\/th>Mechanical \/ Vibration Resistance Indicators<\/th>Core Application Requirements<\/th><\/tr><\/thead>
Advanced Lithography Machines (EUV \/ ArF Immersion)<\/td>Integrated Water-Cooled SiC Machine Base \/ Reticle Stage Base<\/td>Flatness \u22640.05\u03bcm\/mStraightness \u22640.03\u03bcm\/mPerpendicularity \u22640.05\u03bcm\/mSurface Roughness Ra \u22640.01\u03bcm<\/td>Thermal Conductivity \u2265180W\/(m\u00b7K)Coefficient of Linear Thermal Expansion \u22483.8\u00d710\u207b\u2076\/\u2103Temperature Difference Across Entire Area under Water Cooling \uff1c0.05\u2103<\/td>Elastic Modulus \u2265420GPaSpecific Stiffness Much Higher Than GraniteDeformation \uff1c1nm During High-Speed ScanningHigh Damping to Suppress Nanometer-Level Micro-Vibration<\/td>No Elastic Deformation During High-Speed Scanning; Uniform Temperature Control Eliminates Thermal Drift; Lightweight Design Reduces Driving Load, Ensuring Overlay Accuracy of 2\u20137nm<\/td><\/tr>
Wafer Metrology Equipment (CD-SEM \/ White Light Interferometer \/ Defect Inspection)<\/td>Medium & Small-Sized Water-Cooled SiC Substrate<\/td>Flatness: 0.05~0.1\u03bcm\/mHeight Difference \u22640.1\u03bcm Per Whole PlateRa \u22640.02\u03bcm<\/td>Thermal Conductivity \u2265150W\/(m\u00b7K)Temperature Difference Under Water Cooling \uff1c0.1\u2103<\/td>High Rigidity to Restrain Imaging Shake; Low Dust Generation & Wear Resistance<\/td>Avoid Warpage Caused by Local Heating to Prevent Optical Imaging Distortion; Repeat Measurement Error \uff1c2nm<\/td><\/tr>
12-inch Semiconductor Prober<\/td>Solid Precision SiC Substrate<\/td>Flatness \u22640.1\u03bcm\/mParallelism \u22640.1\u03bcm\/m<\/td>Thermal Conductivity: 120~160W\/(m\u00b7K); No Built-In Water Cooling, Relies on Ambient Constant Temperature \u00b10.1\u2103<\/td>High Density & High Damping to Isolate Ground Vibration; Long-Term Wear Resistance Without Dust Generation<\/td>Ensure Repeated Positioning Accuracy of Probe Needles and Prevent Scrap Caused by Pad Offset<\/td><\/tr>
Wafer Polishing \/ Thinning \/ Laser Cutting Equipment<\/td>Solid SiC Machine Tool Base<\/td>Flatness: 0.1~0.2\u03bcm\/mThickness Uniformity \u22640.2\u03bcm<\/td>Thermal Conductivity \u2265130W\/(m\u00b7K)<\/td>Ultra-High Hardness, No Wear Under Reciprocating Machining; High Rigidity to Suppress Cutting Vibration<\/td>Guarantee Uniform Wafer TTV Thickness and Avoid Hard Particle Contamination on Wafer Surface<\/td><\/tr>
Ultra-Precision Diamond Turning Lathe \/ Nano Grinding Machine<\/td>Integrated Water-Cooled SiC Gantry Base<\/td>Flatness \u22640.08\u03bcm\/mStraightness of Guide Rail Mounting Reference \u22640.04\u03bcm\/m<\/td>Uniform Heat Exchange in Water Flow Channels; Overall Machine Temperature Difference \uff1c0.08\u2103<\/td>Lightweight & High Rigidity with Minimal Deformation During High-Speed Cutting<\/td>Machining of Optical Lenses & Molds with Surface Shape Accuracy Within \u03bb\/50<\/td><\/tr>
High-Precision Coordinate Measuring Machine (CMM)<\/td>Solid SiC Sliding Base<\/td>Flatness: 0.1~0.15\u03bcm\/mPerpendicularity \u22640.1\u03bcm\/m<\/td>Low Thermal Expansion; Dimensional Drift Negligible Under Slight Ambient Temperature Fluctuations<\/td>Lighter Self-Weight with Faster Motion Response Than Granite<\/td>Realize Sub-Micron 3D Dimensional Inspection and Reduce Workload of Temperature Compensation<\/td><\/tr>
Space Optics \/ Space Telescope Payloads<\/td>Lightweight Hollow Water-Cooled SiC Base<\/td>Mirror Reference Surface Figure Accuracy \u03bb\/100 RMSOverall Flatness \u22640.05\u03bcm\/m<\/td>Stable Under Wide Temperature Range (-180\u2103~120\u2103) Without Obvious Deformation; High Thermal Conductivity for Rapid Temperature Equalization<\/td>30%~60% Weight Reduction; Radiation Resistance & Micro-Vibration Resistance<\/td>Adapt to Extreme Space Temperature Differences, Lower Launch Load, and Maintain Long-Term Stable Surface Shape<\/td><\/tr>
MOCVD \/ Crystal Growth Equipment Carrier Substrate<\/td>Solid Constant-Temperature SiC Base<\/td>Flatness: 0.2~0.3\u03bcm\/m<\/td>High Temperature Resistance Above 1400\u2103, Excellent Thermal Shock Stability & Uniform Heat Conduction<\/td>Low Outgassing & Plasma Corrosion Resistance<\/td>Ensure Uniform Temperature Field on Wafer Epitaxial Layer and Reduce Crystal Defects<\/td><\/tr>
High-Computing AI Liquid Cooling Module Base<\/td>Integrated Microchannel Water-Cooled SiC Substrate<\/td>Assembly Reference Flatness \u22640.2\u03bcm\/m<\/td>Thermal Conductivity \u2265200W\/(m\u00b7K), Heat Dissipation for High Heat Flux Density<\/td>Insulating Property & High Rigidity Without Leakage Risk<\/td>Rapidly Dissipate High Heat from GPUs and Stabilize Module Positioning Accuracy<\/td><\/tr>
Traditional Granite Base (Benchmark Reference)<\/td>Solid Stone Base<\/td>Flatness: 0.2~0.5\u03bcm\/m; Poor Thermal Conductivity, Unable to Embed Integrated Water Cooling<\/td>Thermal Conductivity: 3~5W\/(m\u00b7K); Prone to Warpage Under Local HeatingCoefficient of Linear Thermal Expansion: 4.5~6\u00d710\u207b\u2076\/\u2103<\/td>Heavy Weight; Surface Precision Degrades After Long-Term Wear<\/td>Only Applicable to Ordinary Micron-Level Equipment, Unable to Meet Nanoscale Thermal Control Requirements of Advanced Semiconductors<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n
\"\"<\/figure>","protected":false},"excerpt":{"rendered":"

Application Field Product Type Key Precision Indicators (Reference Surface) Thermal Performance Indicators Mechanical \/ Vibration Resistance Indicators Core Application Requirements Advanced Lithography Machines (EUV \/ ArF Immersion) Integrated Water-Cooled SiC Machine Base \/ Reticle Stage Base Flatness \u22640.05\u03bcm\/mStraightness \u22640.03\u03bcm\/mPerpendicularity \u22640.05\u03bcm\/mSurface Roughness Ra \u22640.01\u03bcm Thermal Conductivity \u2265180W\/(m\u00b7K)Coefficient of Linear Thermal Expansion \u22483.8\u00d710\u207b\u2076\/\u2103Temperature Difference Across Entire Area…<\/p>","protected":false},"author":1,"featured_media":3026,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_seopress_titles_title":"","_seopress_titles_desc":"","_seopress_robots_index":"","_seopress_robots_follow":"","_seopress_robots_imageindex":"","_seopress_robots_snippet":"","_seopress_robots_primary_cat":"","_seopress_robots_breadcrumbs":"","_seopress_robots_freeze_modified_date":"","_seopress_robots_custom_modified_date":"","_seopress_robots_canonical":"","_seopress_social_fb_title":"","_seopress_social_fb_desc":"","_seopress_social_fb_img":"","_seopress_social_fb_img_attachment_id":0,"_seopress_social_fb_img_width":0,"_seopress_social_fb_img_height":0,"_seopress_social_twitter_title":"","_seopress_social_twitter_desc":"","_seopress_social_twitter_img":"","_seopress_social_twitter_img_attachment_id":0,"_seopress_social_twitter_img_width":0,"_seopress_social_twitter_img_height":0,"_seopress_redirections_value":"","_seopress_redirections_enabled":"","_seopress_redirections_enabled_regex":"","_seopress_redirections_logged_status":"","_seopress_redirections_param":"","_seopress_redirections_type":0,"_seopress_analysis_target_kw":"","_kad_blocks_custom_css":"","_kad_blocks_head_custom_js":"","_kad_blocks_body_custom_js":"","_kad_blocks_footer_custom_js":"","_kadence_starter_templates_imported_post":false,"_kad_post_transparent":"","_kad_post_title":"","_kad_post_layout":"","_kad_post_sidebar_id":"","_kad_post_content_style":"","_kad_post_vertical_padding":"","_kad_post_feature":"","_kad_post_feature_position":"","_kad_post_header":false,"_kad_post_footer":false,"_kad_post_classname":"","footnotes":""},"categories":[35],"tags":[],"class_list":["post-3025","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-news"],"taxonomy_info":{"category":[{"value":35,"label":"NEWS"}]},"featured_image_src_large":["https:\/\/jtlcnc.com\/wp-content\/uploads\/2026\/06\/20260618-151317.png",1000,773,false],"author_info":{"display_name":"jinxing6611@gmail.com","author_link":"https:\/\/jtlcnc.com\/ru\/author\/jtlcnc\/"},"comment_info":0,"category_info":[{"term_id":35,"name":"NEWS","slug":"news","term_group":0,"term_taxonomy_id":35,"taxonomy":"category","description":"","parent":0,"count":310,"filter":"raw","cat_ID":35,"category_count":310,"category_description":"","cat_name":"NEWS","category_nicename":"news","category_parent":0}],"tag_info":false,"_links":{"self":[{"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/posts\/3025","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/comments?post=3025"}],"version-history":[{"count":1,"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/posts\/3025\/revisions"}],"predecessor-version":[{"id":3027,"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/posts\/3025\/revisions\/3027"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/media\/3026"}],"wp:attachment":[{"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/media?parent=3025"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/categories?post=3025"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/tags?post=3025"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}