{"id":2860,"date":"2026-06-03T09:43:17","date_gmt":"2026-06-03T01:43:17","guid":{"rendered":"https:\/\/jtlcnc.com\/?p=2860"},"modified":"2026-06-03T09:43:18","modified_gmt":"2026-06-03T01:43:18","slug":"how-to-handle-gaps-in-a-granite-base","status":"publish","type":"post","link":"https:\/\/jtlcnc.com\/ru\/2026\/06\/03\/how-to-handle-gaps-in-a-granite-base\/","title":{"rendered":"How to handle gaps in a granite base?"},"content":{"rendered":"

Gaps in granite bases (platforms) for semiconductors \/ precision equipment: the core principle is to the crack first, then structurally reinforce, and finally perform precision repositioning and calibration; the use of ordinary marble glue \/ cement is strictly prohibited. Low-shrinkage, high-idity, anti-static specialized epoxy must be used, and the entire process must be operated in a constant-temperature, dust-free environment.<\/p>\n\n\n\n

I. First, determine the type (to decide the solution)
Hairline gap (<0.2mm): surface micro-crack, no misalignment, minimal impact on precision \u2192 cleaning penetrating epoxy sealing.Open gap (0.2\u20132mm): has width, no obvious misalignment \u2192 slotting and cleaning rigid epoxy filling grinding and polishing. Structural crack (>2mm through-crack \/ misalignment): base cracking, flatness \/ perpendicularity out of tolerance \u2192 professional disassembly bonding mechanical reinforcement regrinding and calibration.
Joint gap (at interface of two blocks): joint cracking, light leakage \/ dust seepage \u2192 realignment structural epoxy joint grinding flatness re-measurement.<\/p>\n\n\n\n

II. Precision Base Standard Repair Process (iconductor Grade)<\/p>\n\n\n\n

    \n
  1. Machine shutdown protection and environmental control
    Power off the equipment, remove upper components, and completely unload the base;
    Environment: 22\u00b105\u2103, humidity 40%\u201360%, dust-free ISO7, to avoid temperature-induced deformation.<\/li>\n\n\n\n
  2. Thorough cleaning of the gap (Critical!, debonding will occur)
    Dry cleaning: sweep dust with a soft brush \u2192 deep blow with 0.4\u20130.6MPa compressed air, no residual particles
    Degreasing: wipe the gap and the 20mm area on both sides with acetone \/ anhydrous ethanol, wipe dry with a lint-free cloth;
    Drying air dry naturally for 30min or blow dry with hot air (\u226440\u2103), water content in the gap <5%.<\/li>\n\n\n\n
  3. Gap pretreatment (depending on)
    Hairline gap: no slotting required, directly penetrate with epoxy;
    0.2\u20132mm gap: use a diamond thin blade to cut a V-shaped (width 3\u20135mm, depth 3\u20135mm), chamfer the slot opening to increase the bonding area;<\/li>\n<\/ol>\n\n\n\n
    \n

    2mm \/ through-crack: drill and holes (M6\u2013M8) on both sides, reserve positions for stainless steel connecting plates for later mechanical reinforcement.<\/p>\n\n\n\n

      \n
    1. Select the right materials (Semiconductor specialized ordinary glues strictly prohibited)
      \u0422\u0430\u0431\u043b\u0438\u0446\u0430
      Gap Type Recommended Material Key Indicators
      Hairline \/ Micro-gap Low-viscosity penetrating epoxy Viscosity <10cps, shrinkage <0.5%, anti-static 10\u2076\u201310\u00b9\u00b9\u03a9 Open \/ Joint gap Rigid structural epoxy (1:1 or2:1) Compressive strength >80MPa, thermal expansion <4.5\u00d710\u207b\u2076\/\u2103, Shore D hardness >80
      Structural crackStructural epoxy stainless steel connecting plates Epoxy strength >3000PSI, connecting plates 304\/316L, rust-proof and non-
      \u274c Prohibited: Marble glue (high shrinkage, brittle), silicone sealant (soft, affects precision), cement (expansion, corrosion).<\/li>\n\n\n\n
    2. Filling and curing (Constant temperature dust-free)
      Mixing: mix according to the ratio (e.g., 2:1), stir for \u226590s, no bubbles; a small amount of pigment can be added (to match Jinan Green);
      Filling:
      Micro-gap: slowly inject with a syringe until the gap overflows;
      Slotted gap: press and with a putty knife, slightly higher than the surface by 0.5mm (to compensate for shrinkage), avoid bubbles;
      Curing: cure at a constant temperature of 2\u2103 for 24h to reach 80% strength, 48h for full cure; vibration, pressure, and temperature fluctuations are strictly prohibited during this period<\/li>\n<\/ol>\n<\/blockquote>\n\n\n\n
        \n
      1. Grinding and Polishing Precision Reset (Core! Restore to nanometer level)
        Rough grinding: Diamond grinding discs (#120\u2192#400\u2192#800) grind layer by layer to align with the original plane;
        Fine grinding: #1500\u2192#3000 grinding discs, flatness \u22642\u03bcm\/m, Ra\u22640.05\u03bcm;
        Calibration: Laser interferometer re-checks flatness \/ perpendicularity, overall fine grinding if necessary;
        Anti-static: Spray anti-static coating on the surface, re-measure resistance 10\u2076\u201310\u00b9\u00b9\u03a9.<\/li>\n\n\n\n
      2. Reinforcement and Prevention (Mandatory for structural cracks)
        Mechanical reinforcement: Lock stainless steel connecting plates high-strength bolts on both sides of the crack to prevent secondary cracking;
        Vibration isolation optimization: Check active \/ passive vibration isolators, adjust level and pre-compression to reduce vibration stress;
        Daily control: Constant temperature 22\u00b10.5\u2103, avoid rapid heating and cooling, regularly (every 3\u20136 months) re-check precision.
        III. Common Pitfalls (Must Avoid)
        Using marble glue \/ ordinary epoxy: High shrinkage, brittle, prone to secondary cracking, precision not guaranteed;
        Incomplete cleaning: Oil \/ dust leads to debonding and rework;
        Room temperature \/ low temperature curing: Insufficient strength, large deformation, strictly prohibited for semiconductor grade;
        Filling without grinding: Surface protrusions \/ depressions, flatness out of tolerance, equipment motion jamming.
        IV. When Factory Return \/ Professional Treatment is Mandatory
        Cracks penetrate the base, obvious misalignment (>0.1mm);
        Flatness \/ perpendicularity exceeds 00 grade (>2\u03bcm\/m), cannot be repaired on-site;
        Base material is loose, weathered, or cracks continue to expand;
        Bases of lithography machines \/ high-end inspection equipment must be repaired by the original factory \/ precision workshop.<\/li>\n<\/ol>\n\n\n\n
        \"\"<\/figure>","protected":false},"excerpt":{"rendered":"

        Gaps in granite bases (platforms) for semiconductors \/ precision equipment: the core principle is to the crack first, then structurally reinforce, and finally perform precision repositioning and calibration; the use of ordinary marble glue \/ cement is strictly prohibited. Low-shrinkage, high-idity, anti-static specialized epoxy must be used, and the entire process must be operated in…<\/p>","protected":false},"author":1,"featured_media":2863,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_seopress_robots_primary_cat":"","_seopress_titles_title":"","_seopress_titles_desc":"","_seopress_robots_index":"","_seopress_analysis_target_kw":"","_kad_blocks_custom_css":"","_kad_blocks_head_custom_js":"","_kad_blocks_body_custom_js":"","_kad_blocks_footer_custom_js":"","_kadence_starter_templates_imported_post":false,"_kad_post_transparent":"","_kad_post_title":"","_kad_post_layout":"","_kad_post_sidebar_id":"","_kad_post_content_style":"","_kad_post_vertical_padding":"","_kad_post_feature":"","_kad_post_feature_position":"","_kad_post_header":false,"_kad_post_footer":false,"_kad_post_classname":"","footnotes":""},"categories":[35],"tags":[],"class_list":["post-2860","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-news"],"taxonomy_info":{"category":[{"value":35,"label":"NEWS"}]},"featured_image_src_large":["https:\/\/jtlcnc.com\/wp-content\/uploads\/2026\/06\/20260602-084541.png",410,306,false],"author_info":{"display_name":"jinxing6611@gmail.com","author_link":"https:\/\/jtlcnc.com\/ru\/author\/jtlcnc\/"},"comment_info":0,"category_info":[{"term_id":35,"name":"NEWS","slug":"news","term_group":0,"term_taxonomy_id":35,"taxonomy":"category","description":"","parent":0,"count":236,"filter":"raw","cat_ID":35,"category_count":236,"category_description":"","cat_name":"NEWS","category_nicename":"news","category_parent":0}],"tag_info":false,"_links":{"self":[{"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/posts\/2860","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/comments?post=2860"}],"version-history":[{"count":2,"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/posts\/2860\/revisions"}],"predecessor-version":[{"id":2864,"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/posts\/2860\/revisions\/2864"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/media\/2863"}],"wp:attachment":[{"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/media?parent=2860"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/categories?post=2860"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/tags?post=2860"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}