Etching \/ Deposition Machines: High-purity Al\u2082O\u2083 liners, gas showerheads, focus rings, insulation rings, plasma corrosion resistant, low contamination.
Lithography Machine Worktables \/ Micro-motion Stages: SiC ceramics, low thermal expansion, high thermal conductivity, lightweight, ensuring nanometer-level motion stability.
Wafer Transfer: Si\u2083N\u2084 ceramic arms, electrostatic chucks (ESC), vacuum suction plates, anti-static, wear-resistant, no particle shedding.
Heat Treatment \/ Epitaxy: Ceramic heating plates, crucibles, insulation parts, long-term stability at 1000\u2103 .
Ion Implantation: Insulating brackets, high-voltage isolation parts, high insulation, high-voltage resistant, sputter-resistant.<\/li>\n<\/ol>\n\n\n\n
- \n
- Precision Granite: The preferred choice for large bases, platforms, and vibration isolation references<\/li>\n<\/ol>\n\n\n\n
Lithography (EUV\/ArF) main machine base: Ultra-large size, high rigidity, strong vibration damping, isolates ground vibration, ensures nanometer-level positioning.
Wafer inspection \/ metrology equipment: CMM, optical inspection instruments, laser interferometer platforms, high flatness, long-term stability.
CMP equipment bed \/ guide rails: Heavy load, low vibration, good thermal stability, ensures polishing uniformity.
Bonding \/ packaging equipment base: Suppresses vibration, improves bonding accuracy and yield.<\/p>\n\n\n\nIII. Machining and Assembly Differences (Semiconductor Mass Production Concerns)
\u0412\u044b\u0441\u043e\u043a\u043e\u0442\u0432\u0435\u0440\u0434\u0430\u044f \u043a\u0435\u0440\u0430\u043c\u0438\u043a\u0430
Machining: Only diamond grinding \/ polishing; drilling, tapping, and complex cavities are extremely difficult and expensive.
Assembly: Mostly pre-embedded metal inserts, flexible fixation, impact-forbidden, suitable for precision assembly of small and medium-sized parts.
Advantages: Clean, burr-free, no particle shedding, no wafer contamination.
Precision Granite
Machining: Fully mature processes for sawing, milling, grinding, drilling, and tapping; capable of complex steps, hole systems, and embedded parts.
Assembly: Direct tapping, installation of threaded sleeves, rigid connection, high fault tolerance, suitable for large-scale structural integration.
Limitations: Micro-pores easily trap dirt; requires surface sealing \/ coating to meet cleanroom requirements.
IV. Cost and Selection Recommendations
\u0421\u0442\u043e\u0438\u043c\u043e\u0441\u0442\u044c
Ceramics: Expensive raw materials machining; high cost for small and medium-sized, high-precision parts.
Granite: High cost-performance ratio; cost for large parts is far lower than ceramics, suitable for mass-produced equipment.
Selection Guide (Semiconductor Scenarios)
\u2705 Prioritize High-Hardness Ceramics
Internal components of etching \/ deposition \/ ion implantation chambers (plasma-resistant, low contamination);
Lithography machine worktables \/ micro-motion stages, wafer transfer arms, electrostatic chucks (low thermal expansion, high thermal conductivity, wear-resistant);
High-temperature \/ thermal cycling conditions (heat treatment, epitaxy);
High vacuum \/ ultra-clean environments (non-outgassing, no particle shedding).
\u2705 Prioritize Precision Granite
Large mainframes \/ beds \/ platforms for lithography machines, inspection machines, and CMP (ultra-large size, strong vibration damping, high rigidity);
Precision measurement equipment sensitive to vibration but with controllable temperature differences;
Budget-sensitive, large-scale, mass-produced equipment bases.
V. One-Sentence Summary
High-Hardness Ceramics: The “King of High Precision and Cleanliness” for in-chamber \/ moving parts \/ extreme conditions, but brittle, difficult to machine, expensive, and cannot be made large.
Precision Granite: The “Stable and Heavy Skeleton” for large bases \/ platforms \/ vibration-damping references, with good vibration damping, easy machining, and high cost-performance, but susceptible to corrosion and scratching.<\/p>\n\n\n\n![\"\"](\"https:\/\/jtlcnc.com\/wp-content\/uploads\/2026\/05\/11.jpg\")
<\/figure>","protected":false},"excerpt":{"rendered":"In the semiconductor industry, high-hardness ceramics (Al\u2082O\u2083, SiC, Si\u2083N\u2084, etc.) primarily target “chamber interiors \/ moving parts \/ extreme operating conditions,” while granite focuses on “large bases \/ platforms \/ vibration isolation references,” forming a clear complementary division of labor. The following is a direct comparison from four aspects: performance, typical applications, machining and assembly,…<\/p>","protected":false},"author":1,"featured_media":2828,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_seopress_robots_primary_cat":"","_seopress_titles_title":"","_seopress_titles_desc":"","_seopress_robots_index":"","_seopress_analysis_target_kw":"","_kad_blocks_custom_css":"","_kad_blocks_head_custom_js":"","_kad_blocks_body_custom_js":"","_kad_blocks_footer_custom_js":"","_kadence_starter_templates_imported_post":false,"_kad_post_transparent":"","_kad_post_title":"","_kad_post_layout":"","_kad_post_sidebar_id":"","_kad_post_content_style":"","_kad_post_vertical_padding":"","_kad_post_feature":"","_kad_post_feature_position":"","_kad_post_header":false,"_kad_post_footer":false,"_kad_post_classname":"","footnotes":""},"categories":[35],"tags":[],"class_list":["post-2827","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-news"],"taxonomy_info":{"category":[{"value":35,"label":"NEWS"}]},"featured_image_src_large":["https:\/\/jtlcnc.com\/wp-content\/uploads\/2026\/05\/11.jpg",600,450,false],"author_info":{"display_name":"jinxing6611@gmail.com","author_link":"https:\/\/jtlcnc.com\/ru\/author\/jtlcnc\/"},"comment_info":0,"category_info":[{"term_id":35,"name":"NEWS","slug":"news","term_group":0,"term_taxonomy_id":35,"taxonomy":"category","description":"","parent":0,"count":220,"filter":"raw","cat_ID":35,"category_count":220,"category_description":"","cat_name":"NEWS","category_nicename":"news","category_parent":0}],"tag_info":false,"_links":{"self":[{"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/posts\/2827","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/comments?post=2827"}],"version-history":[{"count":1,"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/posts\/2827\/revisions"}],"predecessor-version":[{"id":2829,"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/posts\/2827\/revisions\/2829"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/media\/2828"}],"wp:attachment":[{"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/media?parent=2827"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/categories?post=2827"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jtlcnc.com\/ru\/wp-json\/wp\/v2\/tags?post=2827"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}