{"id":2877,"date":"2026-06-05T15:13:21","date_gmt":"2026-06-05T07:13:21","guid":{"rendered":"https:\/\/jtlcnc.com\/?p=2877"},"modified":"2026-06-05T15:13:24","modified_gmt":"2026-06-05T07:13:24","slug":"can-the-precision-of-an-air-bearing-multi-axis-precision-motion-platform-reach-the-nanometer-level","status":"publish","type":"post","link":"https:\/\/jtlcnc.com\/fr\/2026\/06\/05\/can-the-precision-of-an-air-bearing-multi-axis-precision-motion-platform-reach-the-nanometer-level\/","title":{"rendered":"Can the precision of an air-bearing multi-axis precision motion platform reach the nanometer level?"},"content":{"rendered":"<p>Air-bearing multi-axis platform accuracy specification<br>Nanometer-level accuracy can be achieved<br>1 Nanometer-level indicators (000-grade granite base voice coil \/ linear motor nanometer grating)<br>Positioning accuracy: \u00b10.05\u03bcm (50nm) ~ \u00b10.2\u03bcm (200nm)<br>Repeatability: 10nm ~ 50nm<br>Single-axis straightness: \u22640.5\u03bcm\/m<br>Minimum step size: up to 5nm<br>2 Essential conditions for implementation<br>Base: 000-grade Jinan black granite, constant temperature 20\u00b11\u2103, aged and stress-relieved;<br>Air-bearing: Porous air bearing, air film 10~15\u03bcm, clean and dry air source;<br>Feedback: Grating resolution 1nm\/5nm;<br>Environment: Dust-free, VC-E ultra-low vibration foundation.<br>3 Conventional 00-grade configuration<br>Mostly sub-micron level (0.3~1\u03bcm), mainly used for display and PCB inspection, cannot reach nanometer level.<br>4 Applications<br>Nanometer-level platforms: Wafer probing, lithography, optical coupling, nanometer scientific research equipment.<\/p>\n\n\n\n<figure class=\"wp-block-image size-full\"><img alt=\"\" fetchpriority=\"high\" decoding=\"async\" width=\"800\" height=\"566\" src=\"https:\/\/jtlcnc.com\/wp-content\/uploads\/2026\/06\/20260605-150602.png\" class=\"wp-image-2878\" srcset=\"https:\/\/jtlcnc.com\/wp-content\/uploads\/2026\/06\/20260605-150602.png 800w, https:\/\/jtlcnc.com\/wp-content\/uploads\/2026\/06\/20260605-150602-300x212.png 300w, https:\/\/jtlcnc.com\/wp-content\/uploads\/2026\/06\/20260605-150602-768x543.png 768w, https:\/\/jtlcnc.com\/wp-content\/uploads\/2026\/06\/20260605-150602-18x12.png 18w\" sizes=\"(max-width: 800px) 100vw, 800px\" \/><\/figure>","protected":false},"excerpt":{"rendered":"<p>Air-bearing multi-axis platform accuracy specificationNanometer-level accuracy can be achieved1 Nanometer-level indicators (000-grade granite base voice coil \/ linear motor nanometer grating)Positioning accuracy: \u00b10.05\u03bcm (50nm) ~ \u00b10.2\u03bcm (200nm)Repeatability: 10nm ~ 50nmSingle-axis straightness: \u22640.5\u03bcm\/mMinimum step size: up to 5nm2 Essential conditions for implementationBase: 000-grade Jinan black granite, constant temperature 20\u00b11\u2103, aged and stress-relieved;Air-bearing: Porous air bearing, air&#8230;<\/p>","protected":false},"author":1,"featured_media":2878,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_seopress_robots_primary_cat":"","_seopress_titles_title":"","_seopress_titles_desc":"","_seopress_robots_index":"","_seopress_analysis_target_kw":"","_kad_blocks_custom_css":"","_kad_blocks_head_custom_js":"","_kad_blocks_body_custom_js":"","_kad_blocks_footer_custom_js":"","_kadence_starter_templates_imported_post":false,"_kad_post_transparent":"","_kad_post_title":"","_kad_post_layout":"","_kad_post_sidebar_id":"","_kad_post_content_style":"","_kad_post_vertical_padding":"","_kad_post_feature":"","_kad_post_feature_position":"","_kad_post_header":false,"_kad_post_footer":false,"_kad_post_classname":"","footnotes":""},"categories":[35],"tags":[],"class_list":["post-2877","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-news"],"taxonomy_info":{"category":[{"value":35,"label":"NEWS"}]},"featured_image_src_large":["https:\/\/jtlcnc.com\/wp-content\/uploads\/2026\/06\/20260605-150602.png",800,566,false],"author_info":{"display_name":"jinxing6611@gmail.com","author_link":"https:\/\/jtlcnc.com\/fr\/author\/jtlcnc\/"},"comment_info":0,"category_info":[{"term_id":35,"name":"NEWS","slug":"news","term_group":0,"term_taxonomy_id":35,"taxonomy":"category","description":"","parent":0,"count":236,"filter":"raw","cat_ID":35,"category_count":236,"category_description":"","cat_name":"NEWS","category_nicename":"news","category_parent":0}],"tag_info":false,"_links":{"self":[{"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/posts\/2877","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/comments?post=2877"}],"version-history":[{"count":1,"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/posts\/2877\/revisions"}],"predecessor-version":[{"id":2879,"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/posts\/2877\/revisions\/2879"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/media\/2878"}],"wp:attachment":[{"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/media?parent=2877"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/categories?post=2877"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/tags?post=2877"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}