{"id":2751,"date":"2026-05-19T08:34:46","date_gmt":"2026-05-19T00:34:46","guid":{"rendered":"https:\/\/jtlcnc.com\/?p=2751"},"modified":"2026-05-19T08:34:47","modified_gmt":"2026-05-19T00:34:47","slug":"what-are-the-processing-difficulties-of-granite-bases-for-semiconductor-equipment-2","status":"publish","type":"post","link":"https:\/\/jtlcnc.com\/fr\/2026\/05\/19\/what-are-the-processing-difficulties-of-granite-bases-for-semiconductor-equipment-2\/","title":{"rendered":"Quelles sont les difficult\u00e9s de traitement des bases granitiques pour les \u00e9quipements semi-conducteurs ?"},"content":{"rendered":"

La microqualit\u00e9 de la surface des bases en granit des \u00e9quipements semi-conducteurs, caract\u00e9ris\u00e9e par une rugosit\u00e9 \u00e0 l'\u00e9chelle nanom\u00e9trique, l'absence de microd\u00e9fauts, une tr\u00e8s grande propret\u00e9, des propri\u00e9t\u00e9s non magn\u00e9tiques et sans contamination, ainsi qu'une micro-morphologie uniforme, d\u00e9termine directement le rendement des plaquettes et la stabilit\u00e9 \u00e0 long terme de l'\u00e9quipement.<\/p>\n\n\n\n

I. Rugosit\u00e9 de la surface (indicateur de base)
Surfaces de travail (rep\u00e8res \/ guides \/ surfaces sous vide) : Ra \u2264 0,01-0,05 \u03bcm (10-50 nm) ; Les machines de lithographie haut de gamme \/ plateformes d'inspection exigent un Ra \u2264 0,01 \u03bcm (10 nm), une finition miroir, aucune sensation tactile au toucher.
Surfaces non travaillantes \/ C\u00f4t\u00e9s : Ra \u2264 0,2-0,5 \u03bcm, exempt de marques d'outils et de traces de meulage.
Mesure : Inspection compl\u00e8te \u00e0 l'aide de rugosim\u00e8tres de haute pr\u00e9cision (pr\u00e9cision de 0,01 \u03bcm) ou d'interf\u00e9rom\u00e8tres \u00e0 lumi\u00e8re blanche.<\/p>\n\n\n\n

II. D\u00e9fauts microscopiques (tol\u00e9rance z\u00e9ro)
Absence de fissures, de pores, de trous d'\u00e9pingle, de bords \u00e9br\u00e9ch\u00e9s, de piq\u00fbres, de rayures, de marques d'outils ou de particules de meulage r\u00e9siduelles.
Inspection microscopique (microscope \u00e9lectronique) : \u22643 d\u00e9fauts >1 \u03bcm par centim\u00e8tre carr\u00e9 ; les particules flottantes sont strictement interdites.
Bords \/ trous : Chanfrein uniforme C0,5-C2, exempt de bavures et d'angles vifs pour \u00e9viter l'\u00e9caillage et la contamination des plaquettes.<\/p>\n\n\n\n

III. Propret\u00e9 et contaminants de surface
Exempt de poussi\u00e8re, de poudre de pierre, de taches d'eau, de taches d'huile, d'empreintes digitales et d'agents de protection r\u00e9siduels.
Pas de suintement d'huile, d'efflorescence, de jaunissement ou d'exsudats ; convient aux salles blanches de classe 1-100.
Protection : Utiliser uniquement des agents de protection sp\u00e9cialis\u00e9s de qualit\u00e9 alimentaire, non volatils et exempts de poussi\u00e8res ; la protection industrielle ordinaire est interdite.<\/p>\n\n\n\n

IV. Micro-morphologie et consistance
Micro-cr\u00eates et vall\u00e9es uniformes, pas d'ondulations, pas de saillies\/d\u00e9pressions locales.
Brillance constante sur la m\u00eame surface de travail, pas de c\u00f4t\u00e9s clairs\/sombres, pas de diff\u00e9rence de couleur ; direction uniforme de la micro-texture.
Plan\u00e9it\u00e9 : Grade 000, \u22641 \u03bcm\/m ; plan\u00e9it\u00e9 de toute surface de 100\u00d7100 mm \u22640,5 \u03bcm.<\/p>\n\n\n\n

V. Propri\u00e9t\u00e9s non magn\u00e9tiques et puret\u00e9 des mat\u00e9riaux
Pierre exempte de min\u00e9raux ferromagn\u00e9tiques, d'impuret\u00e9s, de veines blanches, de lignes jaunes, de pores et de porosit\u00e9.
Premium Jinan Green \/ Indian Black : Grain ultra-fin, noirceur uniforme, densit\u00e9 \u22652,7 g\/cm\u00b3, taux d'absorption d'eau <0,1%.<\/p>\n\n\n\n

VI. Assurance des processus critiques
Trait\u00e9e dans un atelier \u00e0 temp\u00e9rature constante (20\u00b10,1\u2103) avec un broyage humide sans poussi\u00e8re sur toute la dur\u00e9e du processus.
Post-broyage : Rin\u00e7age \u00e0 l'eau pure \u00e0 haute pression \u2192 s\u00e9chage sans poussi\u00e8re \u2192 emballage sans poussi\u00e8re ; contr\u00f4le de la propret\u00e9 de l'ensemble du processus.<\/p>\n\n\n\n

R\u00e9sum\u00e9
Une rugosit\u00e9 de miroir \u00e0 l'\u00e9chelle nanom\u00e9trique, l'absence de d\u00e9fauts microscopiques, une tr\u00e8s grande propret\u00e9, des propri\u00e9t\u00e9s non magn\u00e9tiques et sans contamination, ainsi qu'une micro-morphologie uniforme sont les exigences les plus strictes pour les bases granitiques des semi-conducteurs.<\/p>\n\n\n\n

\"\"<\/figure>","protected":false},"excerpt":{"rendered":"

La micro-qualit\u00e9 de la surface des bases en granit des \u00e9quipements semi-conducteurs, caract\u00e9ris\u00e9e par une rugosit\u00e9 \u00e0 l'\u00e9chelle nanom\u00e9trique, l'absence de micro-d\u00e9fauts, une tr\u00e8s grande propret\u00e9, des propri\u00e9t\u00e9s non magn\u00e9tiques et sans contamination, ainsi qu'une micro-morphologie uniforme, d\u00e9termine directement le rendement des plaquettes et la stabilit\u00e9 \u00e0 long terme de l'\u00e9quipement. I. Rugosit\u00e9 de surface (indicateur de base) Surfaces de travail (rep\u00e8res \/ guides \/ surfaces sous vide) : Ra \u2264 0,01-0,05 \u03bcm (10-50 nm) ; Machines de lithographie haut de gamme \/ plateformes d'inspection....<\/p>","protected":false},"author":1,"featured_media":2754,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_seopress_titles_title":"","_seopress_titles_desc":"","_seopress_robots_index":"","_seopress_robots_follow":"","_seopress_robots_imageindex":"","_seopress_robots_snippet":"","_seopress_robots_primary_cat":"none","_seopress_robots_breadcrumbs":"","_seopress_robots_freeze_modified_date":"","_seopress_robots_custom_modified_date":"","_seopress_robots_canonical":"","_seopress_social_fb_title":"","_seopress_social_fb_desc":"","_seopress_social_fb_img":"","_seopress_social_fb_img_attachment_id":0,"_seopress_social_fb_img_width":0,"_seopress_social_fb_img_height":0,"_seopress_social_twitter_title":"","_seopress_social_twitter_desc":"","_seopress_social_twitter_img":"","_seopress_social_twitter_img_attachment_id":0,"_seopress_social_twitter_img_width":0,"_seopress_social_twitter_img_height":0,"_seopress_redirections_value":"","_seopress_redirections_enabled":"","_seopress_redirections_enabled_regex":"","_seopress_redirections_logged_status":"both","_seopress_redirections_param":"","_seopress_redirections_type":301,"_seopress_analysis_target_kw":"","_kad_blocks_custom_css":"","_kad_blocks_head_custom_js":"","_kad_blocks_body_custom_js":"","_kad_blocks_footer_custom_js":"","_kadence_starter_templates_imported_post":false,"_kad_post_transparent":"","_kad_post_title":"","_kad_post_layout":"","_kad_post_sidebar_id":"","_kad_post_content_style":"","_kad_post_vertical_padding":"","_kad_post_feature":"","_kad_post_feature_position":"","_kad_post_header":false,"_kad_post_footer":false,"_kad_post_classname":"","footnotes":""},"categories":[35],"tags":[],"class_list":["post-2751","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-news"],"taxonomy_info":{"category":[{"value":35,"label":"NEWS"}]},"featured_image_src_large":["https:\/\/jtlcnc.com\/wp-content\/uploads\/2026\/05\/\u5305\u88c510-1024x768.jpg",1024,768,true],"author_info":{"display_name":"jinxing6611@gmail.com","author_link":"https:\/\/jtlcnc.com\/fr\/author\/jtlcnc\/"},"comment_info":0,"category_info":[{"term_id":35,"name":"NEWS","slug":"news","term_group":0,"term_taxonomy_id":35,"taxonomy":"category","description":"","parent":0,"count":312,"filter":"raw","cat_ID":35,"category_count":312,"category_description":"","cat_name":"NEWS","category_nicename":"news","category_parent":0}],"tag_info":false,"_links":{"self":[{"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/posts\/2751","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/comments?post=2751"}],"version-history":[{"count":1,"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/posts\/2751\/revisions"}],"predecessor-version":[{"id":2755,"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/posts\/2751\/revisions\/2755"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/media\/2754"}],"wp:attachment":[{"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/media?parent=2751"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/categories?post=2751"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/tags?post=2751"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}