Granite: \u22484.5\u00d710\u207b\u2076 \/\u2103
Alumnum: \u224823\u00d710\u207b\u2076 \/\u2103
Cast iron: \u224810\uff5e12\u00d710\u207b\u2076 \/\u2103
A temperature fluctuation of 1\u2103 causes aluminum to de5 times more than granite.
Even a 0.5\u2103 temperature fluctuation inside semiconductor equipment
causes aluminum\/iron structures to drift by several microns, directly scrappine chip.
Granite barely “wanders” with temperature.<\/li>\n\n\n\n
Inside semiconductor equipment:
High-speed motors
Air-bearig platforms
Vacuum pumps
External factory vibrations
Granite’s internal damping is 5\uff5e10 times that of cast iron,
causing vibrations to quickly attenuate without resonmplification.
Vibration >10nm affects lithography alignment and imaging.
Granite is a natural “anti-vibration base”.<\/li>\n\n\n\n
Granite is natural rock, naturally aged over hundreds of millions of years,
with no internal stress, no creep, and no relaxation.
Cast iron and aluminum alloys undergo slight deforma after a few years,
while granite:
Precision drift < 0.5\u03bcm over 10 years
For semiconductor equipment, it is a “permanent reference”.<\/li>\n\n\n\n
Semiconductor equipment often has moving parts weighing several tons,
requiring a base that does not bend, twist, or
Granite has high density and rigidity,
so even large platforms with large spans have minimal deflection.<\/li>\n\n\n\n
Litd inspection equipment have high-precision optical systems,
laser interferometers, and capacitance sensors,
as well as strong electric and magnetic fields.
Cast iron and steel are magnan interfere with precision sensors.
Granite: completely non-magnetic, insulating, rust-proof, and resistant to acids and alkalis.<\/li>\n\n\n\n
Super-grade granite can be ground to:
Flatness 0.2\u03bcm\/m\u00b2 or higher
Surface roughnes 0.02\u03bcm
Once this precision is achieved,
it requires almost no recalibration for decades.<\/li>\n<\/ol>\n\n\n\n
III. Where in Semiconductor Equipment Must Granite Be Used?
Almost all precision workstations depend
Lithography machine base & worktable base
Nanometer-level alignment; a slight error scrapping the entire wafer
Probe station and test station bases
Needle tipsact the chip; vibration directly damages the wafer
Dicing machine, thinning machine, and bonding machine bases
High-speed motion precision positioning
AOI optical inspection equipment platsual imaging must be absolutely stable
Precision supports inside etching and thin film deposition equipment
Chamber environments are harsh; requires corrosion resistance stability
It can be said:
Without ganite bases, advanced process semiconductor equipment simply cannot be manufactured.<\/p>\n\n\n\n
IV. Why not use more advanced materials? Semiconductor manufacturing is a game of nanoscale precision, and granite is the only cost-effective structural material that simultaneously meets the requirements of ultra-stability, ultra-flatness, vibration resistance, low thermal expansion, and long-term dimensional stability. I. Precision Requirements for Semiconductors: Nanometer-level; a difference of 1ns scrappingSemiconductor lithography, etching, inspection, bonding, probe stations\u2026The required precision is:\u00b10.1\u03bcm to tens…<\/p>","protected":false},"author":1,"featured_media":2448,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_seopress_robots_primary_cat":"none","_seopress_titles_title":"","_seopress_titles_desc":"","_seopress_robots_index":"","_kad_blocks_custom_css":"","_kad_blocks_head_custom_js":"","_kad_blocks_body_custom_js":"","_kad_blocks_footer_custom_js":"","_kadence_starter_templates_imported_post":false,"_kad_post_transparent":"","_kad_post_title":"","_kad_post_layout":"","_kad_post_sidebar_id":"","_kad_post_content_style":"","_kad_post_vertical_padding":"","_kad_post_feature":"","_kad_post_feature_position":"","_kad_post_header":false,"_kad_post_footer":false,"_kad_post_classname":"","footnotes":""},"categories":[35],"tags":[],"class_list":["post-2451","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-news"],"taxonomy_info":{"category":[{"value":35,"label":"NEWS"}]},"featured_image_src_large":["https:\/\/jtlcnc.com\/wp-content\/uploads\/2026\/04\/5.png",744,947,false],"author_info":{"display_name":"jinxing6611@gmail.com","author_link":"https:\/\/jtlcnc.com\/fr\/author\/jtlcnc\/"},"comment_info":0,"category_info":[{"term_id":35,"name":"NEWS","slug":"news","term_group":0,"term_taxonomy_id":35,"taxonomy":"category","description":"","parent":0,"count":147,"filter":"raw","cat_ID":35,"category_count":147,"category_description":"","cat_name":"NEWS","category_nicename":"news","category_parent":0}],"tag_info":false,"_links":{"self":[{"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/posts\/2451","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/comments?post=2451"}],"version-history":[{"count":1,"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/posts\/2451\/revisions"}],"predecessor-version":[{"id":2454,"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/posts\/2451\/revisions\/2454"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/media\/2448"}],"wp:attachment":[{"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/media?parent=2451"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/categories?post=2451"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/tags?post=2451"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}
Such as ceramic, Invar, or carbon fiber?
Ceramic: Brittle, expensive, prone to cracking in large sizes
Invar: Extremely expensive, heavy, difficult to machine
Carbon fiber: Complex thermal drift characteristics, poor damping
Artificial marble: Far less stable than natural granite
Considering cost, performance, and size comprehensively, granite is the only optimal solution.
V. One-sentence summary
Semiconductor equipment requires
nanometer-level stability, nanometer-level flatness, and nanometer-level vibration resistance
Granite is precisely the naturally perfect material that is
low thermal expansion, high damping, high rigidity, stress-free, non-magnetic, and corrosion-resistant.<\/p>\n\n\n\n![\"\"](\"https:\/\/jtlcnc.com\/wp-content\/uploads\/2026\/01\/\u82b1\u5c97\u5ca9\u6784\u4ef6-14-768x1024.jpg\")
<\/figure>","protected":false},"excerpt":{"rendered":"