{"id":2108,"date":"2026-03-13T16:20:47","date_gmt":"2026-03-13T08:20:47","guid":{"rendered":"https:\/\/jtlcnc.com\/?p=2108"},"modified":"2026-03-14T14:41:21","modified_gmt":"2026-03-14T06:41:21","slug":"what-are-the-accuracy-grades-of-air-bearing-platforms","status":"publish","type":"post","link":"https:\/\/jtlcnc.com\/fr\/2026\/03\/13\/what-are-the-accuracy-grades-of-air-bearing-platforms\/","title":{"rendered":"Quels sont les degr\u00e9s de pr\u00e9cision des plates-formes \u00e0 coussin d'air ?"},"content":{"rendered":"

The precision grades of precision air-bearing platforms (granite air-bearing platforms) are generally classified in the industry into two systems: motion accuracy and planar referen<\/p>\n\n\n\n

I. Granite Platform Precision Grade (Metrology Grade)
This is the base grade, determining how accurate the reference surface is:Table
Grade Flatness (Typical) Applicable Equipment
Grade 000 \u2264 2 \u03bcm\/m\u00b2 Ultra-high precision CMM, semiconductor inspection, lit air-bearing platforms
Grade 00 \u2264 3 \u03bcm\/m\u00b2 High precision CMM, precision air-bearing motion platforms, inspection tables
Grade 0 \u2264 5 \u03bcm\/m\u00b2 General measuring machines, precision workbenches
Grade 1 \u2264 10 \u03bcm\/m\u00b2 Inspection platforms, marking platforms
Air-bearing plat exclusively use: Grade 00, Grade 000<\/p>\n\n\n\n

II. Air-bearing Motion Platform Precision Grade (Industry Standard)
Divided into 4 levels based on positioning acy and repeatability, directly corresponding to equipment tiers:<\/p>\n\n\n\n

    \n
  1. General Precision Level
    Repeatability: \u00b11 \u03bcm
    Positioning AccuraApplications: General inspection, semi-automatic alignment<\/li>\n\n\n\n
  2. High Precision Level (Most Common)
    Repeatability: \u00b10.5 \u03bcm
    Positioning Acuracy: \u00b11\uff5e2 \u03bcm
    Applications: Standard granite air-bearing platforms, high-end CMM, optical inspection<\/li>\n\n\n\n
  3. Ultra-high Precision Level
    Repeatablity: \u00b10.1\uff5e0.2 \u03bcm
    Positioning Accuracy: \u00b10.5 \u03bcm
    Applications: Semiconductor front-end inspection, laser interferometry, nano-alignment
    4.ano Level
    Repeatability: \u00b110\uff5e50 nm
    Positioning Accuracy: Within \u00b10.1 \u03bcm
    Applications: Lithography, quantum precision, nimprint<\/li>\n<\/ol>\n\n\n\n

    III. Air-bearing Platform Straightness and Perpendicularity Grades (Intuitive Judgment)
    High-end air-bearing platform straightness: .1\uff5e0.5 \u03bcm\/300mm
    Perpendicularity: \u00b11\uff5e3 \u03bcm\/m
    Motion Smoothness: No crawling, no vibration, no jitter<\/p>\n\n\n\n

    IV. Simplest Memorizat Method (Use directly for Quotation \/ Selection)
    Grade 000 Granite Repeatability \u00b10.1\uff5e0.5 \u03bcm = Ultra-high Precision Air-beariatform
    Grade 00 Granite Repeatability \u00b10.5\uff5e1 \u03bcm = High Precision Air-bearing Platform
    Below this, it is generally not considered a precisioning platform.<\/p>\n\n\n\n

    \"\"<\/figure>","protected":false},"excerpt":{"rendered":"

    The precision grades of precision air-bearing platforms (granite air-bearing platforms) are generally classified in the industry into two systems: motion accuracy and planar referen I. Granite Platform Precision Grade (Metrology Grade)This is the base grade, determining how accurate the reference surface is:TableGrade Flatness (Typical) Applicable EquipmentGrade 000 \u2264 2 \u03bcm\/m\u00b2 Ultra-high precision CMM, semiconductor inspection,…<\/p>","protected":false},"author":1,"featured_media":2111,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_seopress_robots_primary_cat":"none","_seopress_titles_title":"","_seopress_titles_desc":"","_seopress_robots_index":"","_kad_blocks_custom_css":"","_kad_blocks_head_custom_js":"","_kad_blocks_body_custom_js":"","_kad_blocks_footer_custom_js":"","_kadence_starter_templates_imported_post":false,"_kad_post_transparent":"","_kad_post_title":"","_kad_post_layout":"","_kad_post_sidebar_id":"","_kad_post_content_style":"","_kad_post_vertical_padding":"","_kad_post_feature":"","_kad_post_feature_position":"","_kad_post_header":false,"_kad_post_footer":false,"_kad_post_classname":"","footnotes":""},"categories":[35],"tags":[],"class_list":["post-2108","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-news"],"taxonomy_info":{"category":[{"value":35,"label":"NEWS"}]},"featured_image_src_large":["https:\/\/jtlcnc.com\/wp-content\/uploads\/2026\/03\/\u5fae\u4fe1\u56fe\u7247_20260312091432_24_25.jpg",800,800,false],"author_info":{"display_name":"jinxing6611@gmail.com","author_link":"https:\/\/jtlcnc.com\/fr\/author\/jtlcnc\/"},"comment_info":0,"category_info":[{"term_id":35,"name":"NEWS","slug":"news","term_group":0,"term_taxonomy_id":35,"taxonomy":"category","description":"","parent":0,"count":119,"filter":"raw","cat_ID":35,"category_count":119,"category_description":"","cat_name":"NEWS","category_nicename":"news","category_parent":0}],"tag_info":false,"_links":{"self":[{"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/posts\/2108","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/comments?post=2108"}],"version-history":[{"count":1,"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/posts\/2108\/revisions"}],"predecessor-version":[{"id":2112,"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/posts\/2108\/revisions\/2112"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/media\/2111"}],"wp:attachment":[{"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/media?parent=2108"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/categories?post=2108"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jtlcnc.com\/fr\/wp-json\/wp\/v2\/tags?post=2108"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}