{"id":3022,"date":"2026-06-30T10:51:07","date_gmt":"2026-06-30T02:51:07","guid":{"rendered":"https:\/\/jtlcnc.com\/?p=3022"},"modified":"2026-06-30T10:51:08","modified_gmt":"2026-06-30T02:51:08","slug":"what-are-the-application-fields-of-silicon-carbide-ceramic-equipment-bases","status":"publish","type":"post","link":"https:\/\/jtlcnc.com\/es\/2026\/06\/30\/what-are-the-application-fields-of-silicon-carbide-ceramic-equipment-bases\/","title":{"rendered":"\u00bfCu\u00e1les son los campos de aplicaci\u00f3n de las bases de equipos de cer\u00e1mica de carburo de silicio?"},"content":{"rendered":"<p class=\"wp-block-paragraph\">Complete Application Fields of Silicon Carbide Ceramic Precision Equipment Bases (Including Integrated Water-Cooled Bases)<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Silicon carbide bases, relying on five core advantages\u2014high specific stiffness, high thermal conductivity, low thermal expansion, wear resistance\/cleanliness, and the ability to integrate water-cooling channels\u2014replace granite, cast iron, aluminum alloy, and alumina ceramics. They are primarily used in nanometer-scale ultra-precision equipment, categorized into six core tracks:<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">I. Integrated Circuit Semiconductor Equipment (Largest application market, main scenario for high-end water-cooled bases)<\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li>Lithography Machines (EUV\/ArF\/Immersion\/Compound Semiconductor Lithography Machines)<br>Main load-bearing water-cooled base of the whole machine, reticle stage base, wafer chuck support frame, air-bearing gantry crossbeam, optical reference base<br>Core value: High-speed scanning without elastic deformation, built-in full-field water-cooling temperature control, thermal drift &lt;1nm, ensuring overlay accuracy of 2\u201310nm; lightweight design significantly reduces drive load, adapting to 3nm\/2nm advanced processes.<\/li>\n\n\n\n<li>Wafer Metrology \/ Inspection Equipment<br>White light interferometers, CD-SEM, defect inspection machines, film thickness measurement machines&#8217; whole-machine bases<br>Replacing traditional granite: Faster heat dissipation, no local thermal warping, long-term maintenance of sub-micron planar reference, avoiding imaging distortion and measurement misjudgment.<\/li>\n\n\n\n<li>Probe Test Stations (12-inch \/ 8-inch chip probe equipment)<br>Whole-machine load-bearing base, probe station XY motion platform base<br>Suppresses micro-vibrations, probe contact repeatability remains stable at the nanometer level, preventing wafer pad contact deviation and scrap.<\/li>\n\n\n\n<li>Wafer Processing Equipment (Dicing, Grinding, Thinning, Polishing Machines)<br>Wafer double-sided polishing machines, SiC substrate thinning machines, laser dicing equipment high-precision machine beds<br>High rigidity suppresses processing vibrations, ensuring wafer TTV thickness uniformity \u22641\u03bcm, wear-resistant and dust-free to prevent wafer surface contamination.<\/li>\n\n\n\n<li>Thin Film, Etching, and Heat Treatment Vacuum Equipment<br>MOCVD, PVD\/CVD, etching machine vacuum chamber external precision support bases, wafer transfer robot bases<br>Vacuum low outgassing, plasma corrosion resistance, dimensionally stable at high temperatures, adapting to long-term hot and cold cycling of the chamber.<\/li>\n<\/ol>\n\n\n\n<p class=\"wp-block-paragraph\">II. Ultra-Precision Optics and Optoelectronic Instruments<br>Large-aperture optical systems: Space telescope mirror substrates, interferometer whole-machine reference water-cooled bases, laser scanning galvanometer bases<br>Synchrotron radiation \/ Precision spectroscopy equipment: Beamline precision load-bearing platforms, optical adjustment table bases<br>Advantages: Stable mirror surface figure in environments with severe temperature differences, lightweight design reduces optical system load, no thermal distortion causing imaging distortion.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">III. High-End Ultra-Precision Machine Tools and Metrology Equipment<br>Nanometer-scale ultra-precision grinders, diamond lathes&#8217; whole-machine beds, gantry bases<br>Coordinate Measuring Machine (CMM) high-precision slide bases, measurement host load-bearing bases<br>Comparison with granite: Can feature integrated water-cooling channels, faster dynamic response, and lighter weight; comparison with steel: Extremely low thermal expansion, dimensionally stable under temperature fluctuations, meeting nanometer-scale dimension detection requirements.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">IV. Aerospace and Space Precision Payloads<br>Satellite optoelectronic payload precision support bases, space telescope integrated water-cooled bases<br>Aerospace inertial measurement equipment, high-precision navigation optical platform bases<br>Core advantages: Lightweight weight reduction, resistance to extreme space temperature differences (\u00b1200\u00b0C), radiation resistance, long-term zero dimensional drift, significantly reducing satellite launch costs.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">V. High-computing AI liquid-cooled precision equipment and power electronics equipment<br>Ultra-high power GPU\/AI server integrated silicon carbide liquid-cooled load-bearing cold plates, computing module precision bases<br>New energy vehicle power modules, wind power converter precision water-cooled substrates<br>Advantages: Insulating and corrosion-resistant, ultra-high thermal conductivity, integrated micro-channel design with no leakage risk, suitable for kilowatt-level high heat flux dissipation scenarios.<br>VI. Photovoltaic and wide-bandgap semiconductor crystal growth equipment<br>Monocrystalline silicon \/ silicon carbide monocrystal furnace body precision support bases, MOCVD epitaxial equipment load-bearing bases<br>Sapphire crystal growth equipment constant temperature bases<br>High temperature resistance, strong thermal shock stability, uniform heat conduction across the entire area, ensuring a uniform temperature field for ingot growth and reducing crystal defects.<\/p>\n\n\n\n<figure class=\"wp-block-image size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"719\" height=\"480\" src=\"https:\/\/jtlcnc.com\/wp-content\/uploads\/2026\/06\/20260605-150840.png\" alt=\"\" class=\"wp-image-3023\" srcset=\"https:\/\/jtlcnc.com\/wp-content\/uploads\/2026\/06\/20260605-150840.png 719w, https:\/\/jtlcnc.com\/wp-content\/uploads\/2026\/06\/20260605-150840-300x200.png 300w, https:\/\/jtlcnc.com\/wp-content\/uploads\/2026\/06\/20260605-150840-18x12.png 18w\" sizes=\"(max-width: 719px) 100vw, 719px\" \/><\/figure>","protected":false},"excerpt":{"rendered":"<p>Campos de aplicaci\u00f3n completos de las bases de precisi\u00f3n de cer\u00e1mica de carburo de silicio para equipos (incluidas las bases integradas con refrigeraci\u00f3n por agua) Las bases de carburo de silicio, gracias a sus cinco ventajas fundamentales \u2014alta rigidez espec\u00edfica, alta conductividad t\u00e9rmica, baja dilataci\u00f3n t\u00e9rmica, resistencia al desgaste y pureza, y la capacidad de integrar canales de refrigeraci\u00f3n por agua\u2014, sustituyen al granito, al hierro fundido, a las aleaciones de aluminio y a la cer\u00e1mica de al\u00famina. Se utilizan principalmente en equipos de ultraprecisi\u00f3n a escala nanom\u00e9trica,\u2026<\/p>","protected":false},"author":1,"featured_media":3023,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_seopress_titles_title":"","_seopress_titles_desc":"","_seopress_robots_index":"","_seopress_robots_follow":"","_seopress_robots_imageindex":"","_seopress_robots_snippet":"","_seopress_robots_primary_cat":"","_seopress_robots_breadcrumbs":"","_seopress_robots_freeze_modified_date":"","_seopress_robots_custom_modified_date":"","_seopress_robots_canonical":"","_seopress_social_fb_title":"","_seopress_social_fb_desc":"","_seopress_social_fb_img":"","_seopress_social_fb_img_attachment_id":0,"_seopress_social_fb_img_width":0,"_seopress_social_fb_img_height":0,"_seopress_social_twitter_title":"","_seopress_social_twitter_desc":"","_seopress_social_twitter_img":"","_seopress_social_twitter_img_attachment_id":0,"_seopress_social_twitter_img_width":0,"_seopress_social_twitter_img_height":0,"_seopress_redirections_value":"","_seopress_redirections_enabled":"","_seopress_redirections_enabled_regex":"","_seopress_redirections_logged_status":"","_seopress_redirections_param":"","_seopress_redirections_type":0,"_seopress_analysis_target_kw":"","_kad_blocks_custom_css":"","_kad_blocks_head_custom_js":"","_kad_blocks_body_custom_js":"","_kad_blocks_footer_custom_js":"","_kadence_starter_templates_imported_post":false,"_kad_post_transparent":"","_kad_post_title":"","_kad_post_layout":"","_kad_post_sidebar_id":"","_kad_post_content_style":"","_kad_post_vertical_padding":"","_kad_post_feature":"","_kad_post_feature_position":"","_kad_post_header":false,"_kad_post_footer":false,"_kad_post_classname":"","footnotes":""},"categories":[35],"tags":[],"class_list":["post-3022","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-news"],"taxonomy_info":{"category":[{"value":35,"label":"NEWS"}]},"featured_image_src_large":["https:\/\/jtlcnc.com\/wp-content\/uploads\/2026\/06\/20260605-150840.png",719,480,false],"author_info":{"display_name":"jinxing6611@gmail.com","author_link":"https:\/\/jtlcnc.com\/es\/author\/jtlcnc\/"},"comment_info":0,"category_info":[{"term_id":35,"name":"NEWS","slug":"news","term_group":0,"term_taxonomy_id":35,"taxonomy":"category","description":"","parent":0,"count":362,"filter":"raw","cat_ID":35,"category_count":362,"category_description":"","cat_name":"NEWS","category_nicename":"news","category_parent":0}],"tag_info":false,"_links":{"self":[{"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/posts\/3022","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/comments?post=3022"}],"version-history":[{"count":1,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/posts\/3022\/revisions"}],"predecessor-version":[{"id":3024,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/posts\/3022\/revisions\/3024"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/media\/3023"}],"wp:attachment":[{"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/media?parent=3022"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/categories?post=3022"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/tags?post=3022"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}