Integrated Air-Bearing XY Measurement Platform Assembly
Structure: The entire granite block is integrally milled and ground. X and Y axes share the same base, cantilever deflection from stacked layers, with both axes completely coplanar; guide rails are planar air bearings, featuring no mechanical friction, no stick-slip, and no wear.
: Iron-coreless linear motor Absolute optical grating scale (1nm resolution)
Accuracy Indicators:
Repeatability \u00b10.05~\u00b10.5\u03bcm; Bid straightness \u22640.1\u03bcm\/100mm; Perpendicularity \u22641\u2033; Speed 0.1~1.5m\/s
Applications: Wafer, optical interferometry, laser confocal microscopy, AFM atomic force microscopy, fiber coupling calibration, high-precision profilometer bases.<\/li>\n\n\n\n
Structure: Granite base Granite gantry crossbeam. The X-axis base and Y-axisantry are precision-bonded separately, paired with linear guides \/ air-bearing guides.
Drive: Linear motor \/ Precision ball screw (Low-budget solution)
Accuracy Indicators:
ability \u00b10.5~\u00b11.5\u03bcm; Stroke 300\u00d7300mm~1000\u00d72000mm, Load5~30kg
Applications: Coordinate Measuring Machine (CMM), vision measuring machine, 3D profile scanning, semiconductor appearance inspection, precision mold automatic inspection.
III Complete System Components (Measurement-Specific Configuration)
Granite Base Body
Pre-drilled standard M6\/M8 threaded mounting holes and locating pin holes; thickened ribs at bottom, paired with anti-vibration granite supports air vibration isolation pads to isolate ground vibrations.
Guidance System
Nanometer-level measurement: Planar air bearings ( friction, zero hysteresis)
Micrometer-level mass production inspection: High-precision crossed roller linear guides
Drive and Feedback
Iron-coreless linear motor (no cogging, smooth motion) Closed-loop metal grating, with the reading head directly connected to the moving stage to eliminate transmission backlash errors.
Control Unit
Multi-axis servo controller, 2D planar interpolation.<\/li>\n<\/ol>\n\n\n\n
Performance Item Air Bearing Integrated XY (Nanometer-level) Gantry Linear Motor XY (Micrometer-level)
Positioning Resolution 1 10nm
Bidirectional Repeatability \u00b10.05~0.3\u03bcm \u00b10.5~1\u03bcm
Single-axis Straightness0.1\u03bcm\/100mm \u22640.8\u03bcm\/100mm
X\/Y Axis Perpendicularity \u22640.5 arcsec\u22643 arcsec
Flatness (Granite Surface) Grade 000 Grade 00
Maximum Travel 200\u00d7200mm 100\u00d72000mm
Rated Load 2~10kg 5~30kg<\/p>\n\n\n\n
V. Typical Application Scenarios (Ultra-precision Measurement Field) Granite XY Platform for Ultra-Precision Measurement (Granite Motion Stage)Linear Motor Granite XYI. Material Selection and Core Physical Advantages (Why Only Black Granite is Used)Industry Standard Materials: Jinan Blue, Indian Black, Diorite (Black Gold Sand); marble is strictly prohibited. Core characteristics for ultra-precision measurement:Extremely Low Thermal Expansion CoefficientLinear expansion coefficient of 6~8\u03bcm\/m\u30fb\u2103, only1\/3 of steel. Dimensions…<\/p>","protected":false},"author":1,"featured_media":2994,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_seopress_titles_title":"","_seopress_titles_desc":"","_seopress_robots_index":"","_seopress_robots_follow":"","_seopress_robots_imageindex":"","_seopress_robots_snippet":"","_seopress_robots_primary_cat":"","_seopress_robots_breadcrumbs":"","_seopress_robots_freeze_modified_date":"","_seopress_robots_custom_modified_date":"","_seopress_robots_canonical":"","_seopress_social_fb_title":"","_seopress_social_fb_desc":"","_seopress_social_fb_img":"","_seopress_social_fb_img_attachment_id":0,"_seopress_social_fb_img_width":0,"_seopress_social_fb_img_height":0,"_seopress_social_twitter_title":"","_seopress_social_twitter_desc":"","_seopress_social_twitter_img":"","_seopress_social_twitter_img_attachment_id":0,"_seopress_social_twitter_img_width":0,"_seopress_social_twitter_img_height":0,"_seopress_redirections_value":"","_seopress_redirections_enabled":"","_seopress_redirections_enabled_regex":"","_seopress_redirections_logged_status":"","_seopress_redirections_param":"","_seopress_redirections_type":0,"_seopress_analysis_target_kw":"","_kad_blocks_custom_css":"","_kad_blocks_head_custom_js":"","_kad_blocks_body_custom_js":"","_kad_blocks_footer_custom_js":"","_kadence_starter_templates_imported_post":false,"_kad_post_transparent":"","_kad_post_title":"","_kad_post_layout":"","_kad_post_sidebar_id":"","_kad_post_content_style":"","_kad_post_vertical_padding":"","_kad_post_feature":"","_kad_post_feature_position":"","_kad_post_header":false,"_kad_post_footer":false,"_kad_post_classname":"","footnotes":""},"categories":[35],"tags":[],"class_list":["post-2991","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-news"],"taxonomy_info":{"category":[{"value":35,"label":"NEWS"}]},"featured_image_src_large":["https:\/\/jtlcnc.com\/wp-content\/uploads\/2026\/06\/20260623-100251-674x1024.png",674,1024,true],"author_info":{"display_name":"jinxing6611@gmail.com","author_link":"https:\/\/jtlcnc.com\/es\/author\/jtlcnc\/"},"comment_info":0,"category_info":[{"term_id":35,"name":"NEWS","slug":"news","term_group":0,"term_taxonomy_id":35,"taxonomy":"category","description":"","parent":0,"count":311,"filter":"raw","cat_ID":35,"category_count":311,"category_description":"","cat_name":"NEWS","category_nicename":"news","category_parent":0}],"tag_info":false,"_links":{"self":[{"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/posts\/2991","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/comments?post=2991"}],"version-history":[{"count":1,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/posts\/2991\/revisions"}],"predecessor-version":[{"id":2995,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/posts\/2991\/revisions\/2995"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/media\/2994"}],"wp:attachment":[{"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/media?parent=2991"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/categories?post=2991"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/tags?post=2991"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}
Semiconductor Industry: Wafer appearance inspection, chip probe station, Mini LED backlight optical measurement, lithography alignment; non-magnetic properties avoid interference with chip circuits.
Optical \/ Laser Metrology: Laser interferometer calibration, lens curvature measurement, fiber array coupling, holographic inspection, microscopic imaging stage.
Precision Geometric Measurement: Fully automatic vision measuring machine, coordinate measuring machine (CMM), roughness \/ profilometer, precision gear inspection, dimensional metrology of micro-parts in aviation.
Scientific Research Laboratory: Atomic force microscope, scanning electron microscope (SEM) sample stage, micro-nano fabrication positioning, micro-deformation testing of material mechanics.
VI. Daily Maintenance Key Points (To Ensure Long-term Measurement Accuracy)
Environment: Constant temperature of 20\u00b10.5\u2103, clean and dust-free workshop, avoid direct airflow blowing on the surface;
Cleaning: Wipe with dust-free cloth anhydrous ethanol, scratching with hard tools is prohibited;
Air-bearing models: Dry and filtered air source, regularly clean the throttling micro-pores to prevent dust from clogging the air;
Support: Maintain uniform force on four points, prohibit heavy pressure on one side or long-term off-center loading;
Regular Calibration: Re-check straightness and perpendicularity with a laser interferometer every quarter, and correct system compensation parameters.
VII. Summary of Core Advantages Compared to Cast Iron \/ Aluminum Platforms
Cast Iron: Prone to rust, large thermal expansion, poor vibration damping, long-term stress deformation; only used for ordinary rough measurement.
Aluminum Alloy: Extremely high thermal expansion, large error due to temperature changes, only suitable for lightweight high-speed handling, not suitable for metrology.
Granite: Thermally stable, vibration-damping, non-deforming, non-magnetic and wear-resistant, the only reference-grade substrate for ultra-precision measurement.<\/p>\n\n\n\n![\"\"](\"https:\/\/jtlcnc.com\/wp-content\/uploads\/2026\/06\/20260623-100251.png\")
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