{"id":2868,"date":"2026-06-04T11:21:10","date_gmt":"2026-06-04T03:21:10","guid":{"rendered":"https:\/\/jtlcnc.com\/?p=2868"},"modified":"2026-06-04T11:31:42","modified_gmt":"2026-06-04T03:31:42","slug":"precision-specification-of-granite-air-flotation-platform","status":"publish","type":"post","link":"https:\/\/jtlcnc.com\/es\/2026\/06\/04\/precision-specification-of-granite-air-flotation-platform\/","title":{"rendered":"Precision Specification of Granite Air Flotation Platform"},"content":{"rendered":"<p> Applicable Standards: GB\/T20428, ISO8512-2, DIN876, ISO230-1; Test Ambient: 20\u2103\u00b11\u2103, RH40%~60%, Vibration Grade VC-E, Clean Dust-free Environment Part 1: Granite Base Geometric Precision (Benchmark Surface) Precision Grade Flatness Tolerance(\u03bcm per meter) Surface Roughness Ra Adjacent Surface Squareness Typical Application Grade 000 (Ultra-precision) \u22641.0 \u22640.05\u03bcm \u22641.5\u03bcm\/m Semiconductor, Lithography, Nano Inspection Stage Grade 00 (High Precision) \u22642.0 \u22640.10\u03bcm \u22643.0\u03bcm\/m CMM Base, Optical Inspection Equipment Grade 0 (Industrial Precision) \u22644.0 \u22640.20\u03bcm \u22646.0\u03bcm\/m Precision Machining &amp; Vision Inspection Grade 1 (General Industrial) \u22648.0 \u22640.40\u03bcm \u226412\u03bcm\/m Training Bench, Ordinary Automation Fixture  Flatness Calculation Formula: Tolerance = Coefficient \u00d7 \u221a(L\u00d7W); Coefficient:000=0.003,00=0.006,0=0.012,1=0.024 (Unit:\u03bcm) Additional Base Material &amp; Machining Requirement 1.&nbsp;Material: Jinan Black Granite; Linear Expansion Coefficient \u22644.6\u00d710\u207b\u2076\/\u2103, Water Absorption\uff1c0.13%, Shore Hardness HS\u2265702.&nbsp;Guide Mounting Straightness: Grade000 \u22640.8\u03bcm\/m; Grade00 \u22641.6\u03bcm\/m3.&nbsp;Overall Level after Levelling Foot Adjustment: \u22642\u03bcm\/1000mm4.&nbsp;Thread Hole Position Tolerance:000\u2264\u00b10.02mm;00\u2264\u00b10.05mm; Counterbore Parallelism \u22642\u03bcm\/100mm Part 2: Air Bearing Motion Precision (Air Film &amp; Drive System) 1. Positioning Accuracy (Full Travel Range) &#8211; Nano Grade(Base 000): \u00b10.1~\u00b10.3\u03bcm- Sub-micron Grade(Base 00): \u00b10.3~\u00b11.0\u03bcm- Micron Grade(Base 0\/1): \u00b11.0~\u00b13.0\u03bcm 2. Repeat Positioning Accuracy (3\u03c3 Statistical Value) &#8211; Ultra-precision: \u2264\u00b10.05~\u00b10.1\u03bcm- High-precision: \u2264\u00b10.2\u03bcm- General Industrial: \u2264\u00b10.5~\u00b11.0\u03bcm 3. Straightness of Single Axis Full Stroke &#8211; Grade000: \u22640.5\u03bcm\/1000mm- Grade00: \u22641.2\u03bcm\/1000mm- Grade0: \u22643.0\u03bcm\/1000mm 4. Air Film Core Parameter Standard air film thickness: 10~15\u03bcm, Air film stiffness \u2265120N\/\u03bcm; No air hammer &amp; crawling phenomenon, zero mechanical contact friction 5. X\/Y Orthogonality (Multi-axis Platform) Grade000 \u22641 arcsec; Grade00 \u22643 arcsec; Grade0 \u22648 arcsec Part3 Application Grade Matching Table 1.&nbsp;Semiconductor\/Lithography: Grade000 Base + Position \u00b10.2\u03bcm, Repeat \u22640.1\u03bcm2.&nbsp;CMM\/High-end Vision: Grade00 Base + Position \u00b10.5\u03bcm, Repeat \u22640.2\u03bcm3.&nbsp;Precision Machining Inspection: Grade0 Base + Position \u00b11.5\u03bcm, Repeat \u22640.6\u03bcm4.&nbsp;Teaching &amp; Ordinary Fixture: Grade1 Base + Position \u00b13.0\u03bcm Part4 Acceptance &amp; Inspection Condition 1.&nbsp;Pre-test Stabilization: Place platform in constant-temperature room for \u226572h to release internal stone stress before detection2.&nbsp;Inspection Instruments: Laser Interferometer, White-light Roughness Tester, Electronic Precision Level, Squareness Calibrator3.&nbsp;Compliance Code: GB\/T20428, ISO8512-2, DIN876, ISO230-1<\/p>\n\n\n\n<figure class=\"wp-block-image size-full\"><img alt=\"\" fetchpriority=\"high\" decoding=\"async\" width=\"410\" height=\"306\" src=\"https:\/\/jtlcnc.com\/wp-content\/uploads\/2026\/06\/20260602-084541.png\" class=\"wp-image-2863\" srcset=\"https:\/\/jtlcnc.com\/wp-content\/uploads\/2026\/06\/20260602-084541.png 410w, https:\/\/jtlcnc.com\/wp-content\/uploads\/2026\/06\/20260602-084541-300x224.png 300w, https:\/\/jtlcnc.com\/wp-content\/uploads\/2026\/06\/20260602-084541-16x12.png 16w\" sizes=\"(max-width: 410px) 100vw, 410px\" \/><\/figure>","protected":false},"excerpt":{"rendered":"<p>Applicable Standards: GB\/T20428, ISO8512-2, DIN876, ISO230-1; Test Ambient: 20\u2103\u00b11\u2103, RH40%~60%, Vibration Grade VC-E, Clean Dust-free Environment Part 1: Granite Base Geometric Precision (Benchmark Surface) Precision Grade Flatness Tolerance(\u03bcm per meter) Surface Roughness Ra Adjacent Surface Squareness Typical Application Grade 000 (Ultra-precision) \u22641.0 \u22640.05\u03bcm \u22641.5\u03bcm\/m Semiconductor, Lithography, Nano Inspection Stage Grade 00 (High Precision) \u22642.0 \u22640.10\u03bcm&#8230;<\/p>","protected":false},"author":1,"featured_media":2871,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_seopress_robots_primary_cat":"","_seopress_titles_title":"","_seopress_titles_desc":"","_seopress_robots_index":"","_seopress_analysis_target_kw":"","_kad_blocks_custom_css":"","_kad_blocks_head_custom_js":"","_kad_blocks_body_custom_js":"","_kad_blocks_footer_custom_js":"","_kadence_starter_templates_imported_post":false,"_kad_post_transparent":"","_kad_post_title":"","_kad_post_layout":"","_kad_post_sidebar_id":"","_kad_post_content_style":"","_kad_post_vertical_padding":"","_kad_post_feature":"","_kad_post_feature_position":"","_kad_post_header":false,"_kad_post_footer":false,"_kad_post_classname":"","footnotes":""},"categories":[35],"tags":[],"class_list":["post-2868","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-news"],"taxonomy_info":{"category":[{"value":35,"label":"NEWS"}]},"featured_image_src_large":["https:\/\/jtlcnc.com\/wp-content\/uploads\/2026\/06\/20260602-084635.png",800,400,false],"author_info":{"display_name":"jinxing6611@gmail.com","author_link":"https:\/\/jtlcnc.com\/es\/author\/jtlcnc\/"},"comment_info":0,"category_info":[{"term_id":35,"name":"NEWS","slug":"news","term_group":0,"term_taxonomy_id":35,"taxonomy":"category","description":"","parent":0,"count":236,"filter":"raw","cat_ID":35,"category_count":236,"category_description":"","cat_name":"NEWS","category_nicename":"news","category_parent":0}],"tag_info":false,"_links":{"self":[{"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/posts\/2868","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/comments?post=2868"}],"version-history":[{"count":1,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/posts\/2868\/revisions"}],"predecessor-version":[{"id":2870,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/posts\/2868\/revisions\/2870"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/media\/2871"}],"wp:attachment":[{"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/media?parent=2868"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/categories?post=2868"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/tags?post=2868"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}