Base Platform (Solid \/ Honeycomb)
Solid: Thickness 150\u2013300 mm suitable for heavy bases of lithography and etching machines.
Honeycomb: Lightweight (40% weight reduction), suitable for high-speed motion platforms (e.g., wafer stages
Air Bearing \/ Linear Motor Motion Platform
Air Bearing Guide: Micron-level air film suspension, zero friction, no wear, positioning accuracy \u00b150 nm<\/strong>.
Linear: Direct drive, speed up to 2 m\/s, repeatability \u00b11 \u03bcm<\/strong>.
Vibration Isolation Base (Mandatory)
Passive: Natural rubber \/ air, isolating low-frequency vibrations (e.g., ground, fans).
Active: Electromagnetic \/ piezoelectric vibration isolation, real-time cancellation of 1\u20131000 micro-vibrations, standard for lithography machines.
Interfaces and Protection
Precision threads \/ positioning pin holes (\u00b11 \u03bcm), adapted for equipment installation.
Surface-polishing anti-static coating, dust-free, resistant to chemical corrosion (photoresist \/ acids and bases).<\/p>\n\n\n\n
III. Core Application Scenarios (202 Mainstream) IV. Key Indicators for Semiconductor Grade (Acceptance Standards) V. and Production Requirements VI. Selection Key Points Specialized Marble Platform for Semiconductors (Core: High Stability Anti-static Nanometer Precision)Marble platforms for semiconductors (mostly natural granite \/ Jinan Green) serve as the core bases for lithography machines, wafer inspection, die bonding \/ dispensing, and etching \/ deposition, responsible for “locking in” precision and stability in nanometer-scale processes. I. Core Materials (Semiconductor Grade)Material: Jinan Green…<\/p>","protected":false},"author":1,"featured_media":2856,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_seopress_robots_primary_cat":"","_seopress_titles_title":"","_seopress_titles_desc":"","_seopress_robots_index":"","_seopress_analysis_target_kw":"","_kad_blocks_custom_css":"","_kad_blocks_head_custom_js":"","_kad_blocks_body_custom_js":"","_kad_blocks_footer_custom_js":"","_kadence_starter_templates_imported_post":false,"_kad_post_transparent":"","_kad_post_title":"","_kad_post_layout":"","_kad_post_sidebar_id":"","_kad_post_content_style":"","_kad_post_vertical_padding":"","_kad_post_feature":"","_kad_post_feature_position":"","_kad_post_header":false,"_kad_post_footer":false,"_kad_post_classname":"","footnotes":""},"categories":[35],"tags":[],"class_list":["post-2855","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-news"],"taxonomy_info":{"category":[{"value":35,"label":"NEWS"}]},"featured_image_src_large":["https:\/\/jtlcnc.com\/wp-content\/uploads\/2026\/06\/20260602-084707.png",800,400,false],"author_info":{"display_name":"jinxing6611@gmail.com","author_link":"https:\/\/jtlcnc.com\/es\/author\/jtlcnc\/"},"comment_info":0,"category_info":[{"term_id":35,"name":"NEWS","slug":"news","term_group":0,"term_taxonomy_id":35,"taxonomy":"category","description":"","parent":0,"count":236,"filter":"raw","cat_ID":35,"category_count":236,"category_description":"","cat_name":"NEWS","category_nicename":"news","category_parent":0}],"tag_info":false,"_links":{"self":[{"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/posts\/2855","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/comments?post=2855"}],"version-history":[{"count":1,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/posts\/2855\/revisions"}],"predecessor-version":[{"id":2857,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/posts\/2855\/revisions\/2857"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/media\/2856"}],"wp:attachment":[{"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/media?parent=2855"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/categories?post=2855"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/tags?post=2855"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}
Lithography Machines: Mask stage \/ workpiece stage base, nanometer-level positioning, thermal deformation < 0.1 \u03bcm\/h.
Wafer Inspection Surface defect \/ thickness \/ flatness inspection, anti-static, scratch-free, accuracy \u2264 0.5 \u03bcm<\/strong>.
Die Bonding \/ Dispensing: Micro-manipulation, \u00b11 \u03bcm positioning, stable die bonding \/ dispensing, yield improvement of 3% .
Etching \/ Deposition: Equipment base, low thermal expansion, ensuring nan-level linewidth stability.
Coordinate Measuring Machine (CMM): Reference platform, 24h continuous measurement error \u2264 1.9 \u03bcm L\/30<\/strong>.<\/p>\n\n\n\n
Cuadro
Item Semiconductor Grade (Grade 000) General Industrial Grade (Grade )
Flatness \u2264 1 \u03bcm\/m \u2264 10 \u03bcm\/m
Perpendicularity \u2264 2 \u03bcm\/m \u2264 20m\/m
Surface Roughness Ra \u2264 0.05 \u03bcm Ra \u2264 0.8 \u03bcm
Anti-static Value 10\u2076\u20130\u00b9\u00b9 \u03a9 No requirement
Thermal Deformation (24h) \u2264 0.5 \u03bcm\/m \u2264 5 \u03bcm\/m<\/p>\n\n\n\n
Constant Temperature Workshop: 22 \u00b1 0.5 \u2103, humidity 40%\u201360%, dust-free Class 1000 ( 7).
Processing Equipment: Large CNC precision grinding machines, micron-level processing, full-process temperature control.
Inspection: Laser interferometer, optical flat, roughness tester, full inspection traceability.<\/p>\n\n\n\n
Material: Prioritize Jinan Blue (best stability), avoid light-colored marble (high impurities, significant deformation).
Precision Semiconductor front-end (lithography \/ etching) select 000 grade; packaging \/ testing select 00 grade.
Structure: Heavy-duty equipment use solid thick; high-speed motion use honeycomb air float.
Vibration Isolation: Lithography machines \/ high-end testing must be equipped with active vibration isolation; general equipment use passive isolation.<\/p>\n\n\n\n![\"\"](\"https:\/\/jtlcnc.com\/wp-content\/uploads\/2026\/06\/20260602-084707.png\")
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