{"id":2751,"date":"2026-05-19T08:34:46","date_gmt":"2026-05-19T00:34:46","guid":{"rendered":"https:\/\/jtlcnc.com\/?p=2751"},"modified":"2026-05-19T08:34:47","modified_gmt":"2026-05-19T00:34:47","slug":"what-are-the-processing-difficulties-of-granite-bases-for-semiconductor-equipment-2","status":"publish","type":"post","link":"https:\/\/jtlcnc.com\/es\/2026\/05\/19\/what-are-the-processing-difficulties-of-granite-bases-for-semiconductor-equipment-2\/","title":{"rendered":"What are the processing difficulties of granite bases for semiconductor equipment?"},"content":{"rendered":"

The surface micro-quality of semiconductor equipment granite bases, characterized by nanoscale roughness, zero micro-defects, ultra-high cleanliness, non-magnetic and contamination-free properties, and uniform micro-morphology, directly determines wafer yield and long-term equipment stability.<\/p>\n\n\n\n

I. Surface Roughness (Core Indicator)
Working Surfaces (Benchmarks \/ Guides \/ Vacuum Surfaces): Ra \u2264 0.01\u20130.05 \u03bcm (10\u201350 nm); High-end lithography machines \/ inspection platforms require Ra \u2264 0.01 \u03bcm (10 nm), mirror finish, no tactile sensation when touched.
Non-working Surfaces \/ Sides: Ra \u2264 0.2\u20130.5 \u03bcm, free of tool marks and grinding traces.
Measurement: Full inspection using high-precision roughness meters (precision 0.01 \u03bcm) or white light interferometers.<\/p>\n\n\n\n

II. Microscopic Defects (Zero Tolerance)
No cracks, pores, pinholes, chipped edges, pits, scratches, tool marks, or residual grinding particles.
Microscopic Inspection (Electron Microscope): \u22643 defects >1 \u03bcm per square centimeter; free-floating particles strictly prohibited.
Edges \/ Holes: Uniform chamfer C0.5\u2013C2, free of burrs and sharp angles to prevent flaking and wafer contamination.<\/p>\n\n\n\n

III. Cleanliness and Surface Contaminants
Free of dust, stone powder, water stains, oil stains, fingerprints, and residual protective agents.
No oil seepage, efflorescence, yellowing, or exudates; suitable for Class 1\u2013100 cleanrooms.
Protection: Use only food-grade, non-volatile, dust-free specialized protective agents; ordinary industrial protection prohibited.<\/p>\n\n\n\n

IV. Micro-Morphology and Consistency
Uniform micro-peaks and valleys, no waviness, no undulations, no local protrusions\/depressions.
Consistent gloss on the same working surface, no light\/dark sides, no color difference; uniform micro-texture direction.
Flatness: Grade 000, \u22641 \u03bcm\/m; flatness of any 100\u00d7100 mm area \u22640.5 \u03bcm.<\/p>\n\n\n\n

V. Non-Magnetic Properties and Material Purity
Stone free of ferromagnetic minerals, impurities, white veins, yellow lines, pores, and porosity.
Premium Jinan Green \/ Indian Black: Ultra-fine grain, uniform blackness, density \u22652.7 g\/cm\u00b3, water absorption rate <0.1%.<\/p>\n\n\n\n

VI. Critical Process Assurance
Processed in a constant temperature workshop (20\u00b10.1\u2103) with full-process wet dust-free grinding.
Post-grinding: High-pressure pure water rinse \u2192 dust-free drying \u2192 dust-free packaging; full-process cleanliness control.<\/p>\n\n\n\n

Summary
Nanoscale mirror finish roughness, zero microscopic defects, ultra-high cleanliness, non-magnetic and contamination-free properties, and uniform micro-morphology are the hard requirements for semiconductor granite bases.<\/p>\n\n\n\n

\"\"<\/figure>","protected":false},"excerpt":{"rendered":"

The surface micro-quality of semiconductor equipment granite bases, characterized by nanoscale roughness, zero micro-defects, ultra-high cleanliness, non-magnetic and contamination-free properties, and uniform micro-morphology, directly determines wafer yield and long-term equipment stability. I. Surface Roughness (Core Indicator)Working Surfaces (Benchmarks \/ Guides \/ Vacuum Surfaces): Ra \u2264 0.01\u20130.05 \u03bcm (10\u201350 nm); High-end lithography machines \/ inspection platforms…<\/p>","protected":false},"author":1,"featured_media":2754,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_seopress_robots_primary_cat":"none","_seopress_titles_title":"","_seopress_titles_desc":"","_seopress_robots_index":"","_seopress_analysis_target_kw":"","_kad_blocks_custom_css":"","_kad_blocks_head_custom_js":"","_kad_blocks_body_custom_js":"","_kad_blocks_footer_custom_js":"","_kadence_starter_templates_imported_post":false,"_kad_post_transparent":"","_kad_post_title":"","_kad_post_layout":"","_kad_post_sidebar_id":"","_kad_post_content_style":"","_kad_post_vertical_padding":"","_kad_post_feature":"","_kad_post_feature_position":"","_kad_post_header":false,"_kad_post_footer":false,"_kad_post_classname":"","footnotes":""},"categories":[35],"tags":[],"class_list":["post-2751","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-news"],"taxonomy_info":{"category":[{"value":35,"label":"NEWS"}]},"featured_image_src_large":["https:\/\/jtlcnc.com\/wp-content\/uploads\/2026\/05\/\u5305\u88c510-1024x768.jpg",1024,768,true],"author_info":{"display_name":"jinxing6611@gmail.com","author_link":"https:\/\/jtlcnc.com\/es\/author\/jtlcnc\/"},"comment_info":0,"category_info":[{"term_id":35,"name":"NEWS","slug":"news","term_group":0,"term_taxonomy_id":35,"taxonomy":"category","description":"","parent":0,"count":204,"filter":"raw","cat_ID":35,"category_count":204,"category_description":"","cat_name":"NEWS","category_nicename":"news","category_parent":0}],"tag_info":false,"_links":{"self":[{"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/posts\/2751","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/comments?post=2751"}],"version-history":[{"count":1,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/posts\/2751\/revisions"}],"predecessor-version":[{"id":2755,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/posts\/2751\/revisions\/2755"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/media\/2754"}],"wp:attachment":[{"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/media?parent=2751"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/categories?post=2751"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jtlcnc.com\/es\/wp-json\/wp\/v2\/tags?post=2751"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}