Structurally, it consists of a column crossbeam<\/strong> forming a portal frame, supporting linear motors, optical lenses, and motion stages, serving as the skeleton for the entire precision equipment set.<\/li>\n<\/ol>\n\n\n\n
II. Core: Vibration Damping Principle (Why granite damping is far superior to cast iron \/ aluminum alloy)<\/p>\n\n\n\n
1. High Damping Coefficient (Most Critical)<\/p>\n\n\n\n
Damping = The ability of a material to absorb and dissipate vibration energy.<\/p>\n\n\n\n
- \n
- Cast iron damping: 0.02~0.04<\/li>\n\n\n\n
- Aluminum alloy damping: 0.001~0.003<\/li>\n\n\n\n
- Jinan Blue granite damping: 0.06~0.12<\/strong><\/li>\n<\/ul>\n\n\n\n
\n
Principle: Granite is a natural crystal with densely interwoven microcrystals. When vibrations enter the stone, the crystal interfaces will rub together, rapidly converting vibration energy into heat and dissipating it, preventing continuous resonance<\/strong>.
Metal materials decay very slowly when vibrating; once vibration is excited, it will shake continuously, directly causing lens \/ probe positioning drift; granite, when encountering micro-vibrations from the floor or motors, decays rapidly and stops vibrating quickly<\/strong>.<\/p>\n<\/blockquote>\n\n\n\n2. High Self-Weight High Rigidity, Reducing Vibration Response<\/p>\n\n\n\n
Granite has high density, meaning a greater self-weight for the same volume. The larger the mass, the smaller the disturbance amplitude caused by external micro-vibrations to the overall frame.
The natural frequency of the gantry avoids the vibration frequency bands of workshop equipment, reducing the risk of resonance; meanwhile, its high modulus ensures minimal bending deflection under load. When the load stage moves at high speed, the frame produces almost no elastic deformation.<\/p>\n\n\n\n\n
\u26a0\ufe0f Distinguishing Concepts:
Granite is not vibration isolation<\/strong> (vibration isolation is achieved by damping pads and vibration-isolated foundations); granite itself provides damping vibration absorption<\/strong>, suppressing the transmission and amplification of vibrations within the frame. The two work best in combination.<\/p>\n<\/blockquote>\n\n\n\nIII. Supporting Advantages for Semiconductor Equipment (Beyond Damping)<\/p>\n\n\n\n
- \n
- Low Thermal Expansion Coefficient, Dimensional Stability<\/strong>
The thermal expansion coefficient of Jinan Blue is \u22484.16\u00d710\u207b\u2076 \/\u2103. Compared to steel and aluminum alloy, the deformation caused by slight temperature fluctuations is extremely small. Even with minor temperature drifts in semiconductor cleanrooms, the dimensional changes of the gantry frame are minimal, ensuring long-term positioning accuracy.<\/li>\n\n\n\n- Non-magnetic<\/strong>
It contains no ferromagnetic components and will not interfere with optical sensors, laser modules, electromagnetic probes, or wafer electromagnetic detection, making it irreplaceable by metal frames.<\/li>\n\n\n\n- Corrosion-Resistant, Rust-Free<\/strong>
It is resistant to small amounts of photoresist, isopropyl alcohol, and cleaning agents. The surface will not rust or produce tiny particles (the semiconductor industry has extremely strict control over particle contamination, and metal rust particles are a fatal contamination source).<\/li>\n\n\n\n- Ultra-High Precision Working Surfaces<\/strong>
It can be ground in constant temperature and humidity workshops, with flatness up to DIN876 000 grade; threaded steel sleeves, T-slots, wiring channels, and locating pin holes can be directly embedded or machined. OEM integration processing can be completed in one go, facilitating the installation of optical modules and linear motor stages.<\/li>\n<\/ol>\n\n\n\n![\"\"](\"https:\/\/jtlcnc.com\/wp-content\/uploads\/2026\/09\/3333-1024x724.png\")
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- Non-magnetic<\/strong>
- Low Thermal Expansion Coefficient, Dimensional Stability<\/strong>