Main load-bearing water-cooled base of the whole machine, reticle stage base, wafer chuck support frame, air-bearing gantry crossbeam, optical reference base
Core value: High-speed scanning without elastic deformation, built-in full-field water-cooling temperature control, thermal drift <1nm, ensuring overlay accuracy of 2\u201310nm; lightweight design significantly reduces drive load, adapting to 3nm\/2nm advanced processes.<\/li>\n\n\n\n
White light interferometers, CD-SEM, defect inspection machines, film thickness measurement machines’ whole-machine bases
Replacing traditional granite: Faster heat dissipation, no local thermal warping, long-term maintenance of sub-micron planar reference, avoiding imaging distortion and measurement misjudgment.<\/li>\n\n\n\n
Whole-machine load-bearing base, probe station XY motion platform base
Suppresses micro-vibrations, probe contact repeatability remains stable at the nanometer level, preventing wafer pad contact deviation and scrap.<\/li>\n\n\n\n
Wafer double-sided polishing machines, SiC substrate thinning machines, laser dicing equipment high-precision machine beds
High rigidity suppresses processing vibrations, ensuring wafer TTV thickness uniformity \u22641\u03bcm, wear-resistant and dust-free to prevent wafer surface contamination.<\/li>\n\n\n\n
MOCVD, PVD\/CVD, etching machine vacuum chamber external precision support bases, wafer transfer robot bases
Vacuum low outgassing, plasma corrosion resistance, dimensionally stable at high temperatures, adapting to long-term hot and cold cycling of the chamber.<\/li>\n<\/ol>\n\n\n\n
II. Ultra-Precision Optics and Optoelectronic Instruments
Large-aperture optical systems: Space telescope mirror substrates, interferometer whole-machine reference water-cooled bases, laser scanning galvanometer bases
Synchrotron radiation \/ Precision spectroscopy equipment: Beamline precision load-bearing platforms, optical adjustment table bases
Advantages: Stable mirror surface figure in environments with severe temperature differences, lightweight design reduces optical system load, no thermal distortion causing imaging distortion.<\/p>\n\n\n\n
III. High-End Ultra-Precision Machine Tools and Metrology Equipment
Nanometer-scale ultra-precision grinders, diamond lathes’ whole-machine beds, gantry bases
Coordinate Measuring Machine (CMM) high-precision slide bases, measurement host load-bearing bases
Comparison with granite: Can feature integrated water-cooling channels, faster dynamic response, and lighter weight; comparison with steel: Extremely low thermal expansion, dimensionally stable under temperature fluctuations, meeting nanometer-scale dimension detection requirements.<\/p>\n\n\n\n
IV. Aerospace and Space Precision Payloads
Satellite optoelectronic payload precision support bases, space telescope integrated water-cooled bases
Aerospace inertial measurement equipment, high-precision navigation optical platform bases
Core advantages: Lightweight weight reduction, resistance to extreme space temperature differences (\u00b1200\u00b0C), radiation resistance, long-term zero dimensional drift, significantly reducing satellite launch costs.<\/p>\n\n\n\n
V. High-computing AI liquid-cooled precision equipment and power electronics equipment Complete Application Fields of Silicon Carbide Ceramic Precision Equipment Bases (Including Integrated Water-Cooled Bases) Silicon carbide bases, relying on five core advantages\u2014high specific stiffness, high thermal conductivity, low thermal expansion, wear resistance\/cleanliness, and the ability to integrate water-cooling channels\u2014replace granite, cast iron, aluminum alloy, and alumina ceramics. They are primarily used in nanometer-scale ultra-precision equipment,…<\/p>","protected":false},"author":1,"featured_media":3023,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_seopress_titles_title":"","_seopress_titles_desc":"","_seopress_robots_index":"","_seopress_robots_follow":"","_seopress_robots_imageindex":"","_seopress_robots_snippet":"","_seopress_robots_primary_cat":"","_seopress_robots_breadcrumbs":"","_seopress_robots_freeze_modified_date":"","_seopress_robots_custom_modified_date":"","_seopress_robots_canonical":"","_seopress_social_fb_title":"","_seopress_social_fb_desc":"","_seopress_social_fb_img":"","_seopress_social_fb_img_attachment_id":0,"_seopress_social_fb_img_width":0,"_seopress_social_fb_img_height":0,"_seopress_social_twitter_title":"","_seopress_social_twitter_desc":"","_seopress_social_twitter_img":"","_seopress_social_twitter_img_attachment_id":0,"_seopress_social_twitter_img_width":0,"_seopress_social_twitter_img_height":0,"_seopress_redirections_value":"","_seopress_redirections_enabled":"","_seopress_redirections_enabled_regex":"","_seopress_redirections_logged_status":"","_seopress_redirections_param":"","_seopress_redirections_type":0,"_seopress_analysis_target_kw":"","_kad_blocks_custom_css":"","_kad_blocks_head_custom_js":"","_kad_blocks_body_custom_js":"","_kad_blocks_footer_custom_js":"","_kadence_starter_templates_imported_post":false,"_kad_post_transparent":"","_kad_post_title":"","_kad_post_layout":"","_kad_post_sidebar_id":"","_kad_post_content_style":"","_kad_post_vertical_padding":"","_kad_post_feature":"","_kad_post_feature_position":"","_kad_post_header":false,"_kad_post_footer":false,"_kad_post_classname":"","footnotes":""},"categories":[35],"tags":[],"class_list":["post-3022","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-news"],"taxonomy_info":{"category":[{"value":35,"label":"NEWS"}]},"featured_image_src_large":["https:\/\/jtlcnc.com\/wp-content\/uploads\/2026\/06\/20260605-150840.png",719,480,false],"author_info":{"display_name":"jinxing6611@gmail.com","author_link":"https:\/\/jtlcnc.com\/ar\/author\/jtlcnc\/"},"comment_info":0,"category_info":[{"term_id":35,"name":"NEWS","slug":"news","term_group":0,"term_taxonomy_id":35,"taxonomy":"category","description":"","parent":0,"count":310,"filter":"raw","cat_ID":35,"category_count":310,"category_description":"","cat_name":"NEWS","category_nicename":"news","category_parent":0}],"tag_info":false,"_links":{"self":[{"href":"https:\/\/jtlcnc.com\/ar\/wp-json\/wp\/v2\/posts\/3022","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jtlcnc.com\/ar\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jtlcnc.com\/ar\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/ar\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/ar\/wp-json\/wp\/v2\/comments?post=3022"}],"version-history":[{"count":1,"href":"https:\/\/jtlcnc.com\/ar\/wp-json\/wp\/v2\/posts\/3022\/revisions"}],"predecessor-version":[{"id":3024,"href":"https:\/\/jtlcnc.com\/ar\/wp-json\/wp\/v2\/posts\/3022\/revisions\/3024"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jtlcnc.com\/ar\/wp-json\/wp\/v2\/media\/3023"}],"wp:attachment":[{"href":"https:\/\/jtlcnc.com\/ar\/wp-json\/wp\/v2\/media?parent=3022"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jtlcnc.com\/ar\/wp-json\/wp\/v2\/categories?post=3022"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jtlcnc.com\/ar\/wp-json\/wp\/v2\/tags?post=3022"}],"curies":[{"name":"\u062f\u0628\u0644\u064a\u0648 \u0628\u064a","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}
Ultra-high power GPU\/AI server integrated silicon carbide liquid-cooled load-bearing cold plates, computing module precision bases
New energy vehicle power modules, wind power converter precision water-cooled substrates
Advantages: Insulating and corrosion-resistant, ultra-high thermal conductivity, integrated micro-channel design with no leakage risk, suitable for kilowatt-level high heat flux dissipation scenarios.
VI. Photovoltaic and wide-bandgap semiconductor crystal growth equipment
Monocrystalline silicon \/ silicon carbide monocrystal furnace body precision support bases, MOCVD epitaxial equipment load-bearing bases
Sapphire crystal growth equipment constant temperature bases
High temperature resistance, strong thermal shock stability, uniform heat conduction across the entire area, ensuring a uniform temperature field for ingot growth and reducing crystal defects.<\/p>\n\n\n\n![\"\"](\"https:\/\/jtlcnc.com\/wp-content\/uploads\/2026\/06\/20260605-150840.png\")
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